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Semiconductor Equipment Assessment for Key Enabling Technologies

Semiconductor Equipment Assessment for Key Enabling Technologies

Objective

SEA4KET (Semiconductor Equipment Assessment for Key Enabling Technologies) is an IP proposal taking the consequent step from equipment R&D to equipment assessment experiments. The strategic objective is to effectively combine resources and expertise in a joint assessment of novel equipment for key enabling technologies to foster and accelerate the successful transfer of novel European equipment into the world-wide market.SEA4KET builds on the proven principle established in previous European SEA programs and projects: to take novel, innovative and promising equipment that has left the R&D phase into a joint assessment activity – this bridges the well-known gap between the phase of having an engineered tool available and finding the "first user" and finally success in the market for it.While proven principles from previous SEA activities are kept, SEA4KET takes them to the new field of assessing equipment for Key Enabling Technologies: SEA4KET concentrates on process and metrology systems for important enablers of future technologies: 450 mm wafer equipment, SiC material and 3D processing. The proposal comprises 15 sub-projects each dedicated to a specific equipment. The assessment activities were to a lesser extent chosen by "high S&T" excellence, but by their expected chance on the market.While leading R&D institutes are active in each assessment experiment to support individual final developments, several cross-cut R&D activities were identified (and combined in a dedicated sub-project) that are relevant to multiple assessments. Training material will be provided and workshops will be organized, to support and strengthen the individual dissemination activities.SEA4KET will significantly strengthen the European equipment and material industry for the emerging market for Key Enabling Technologies in a sustainable way by combining advanced R&D with equipment assessment involving users, institutes and equipment suppliers – with specific benefit for SME suppliers.
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Coordinator

FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.

Address

Hansastrasse 27c
80686 Munchen

Germany

Activity type

Research Organisations

EU Contribution

€ 2 188 241

Administrative Contact

Andrea Zeumann (Ms.)

Participants (26)

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LAM RESEARCH AG

Austria

EU Contribution

€ 313 713

FACHHOCHSCHULE WIENER NEUSTADT FUR WIRTSCHAFT UND TECHNIK GMBH

Austria

EU Contribution

€ 47 970

EV GROUP E. THALLNER GMBH

Austria

EU Contribution

€ 442 630

MECHATRONIC SYSTEMTECHNIK GMBH

Austria

EU Contribution

€ 110 250

ASM BELGIUM NV

Belgium

EU Contribution

€ 13 230

INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM

Belgium

EU Contribution

€ 722 710

HQ-Dielectrics GmbH

Germany

EU Contribution

€ 185 000

3D-Micromac AG

Germany

EU Contribution

€ 31 434

E+H Metrology GmbH

Germany

EU Contribution

€ 10 968

INFINEON TECHNOLOGIES AG

Germany

EU Contribution

€ 143 601

GLOBALFOUNDRIES Dresden Module One LLC & Co. KG

Germany

FREIBERG INSTRUMENTS GMBH

Germany

EU Contribution

€ 99 798

PETER WOLTERS GMBH

Germany

BRUKER AXS GMBH

Germany

EU Contribution

€ 343 400

ZS-HANDLING GMBH

Germany

EU Contribution

€ 159 500

CASCADE MICROTECH DRESDEN GMBH

Germany

EU Contribution

€ 237 040

FABMATICS GMBH

Germany

EU Contribution

€ 48 000

PFEIFFER VACUUM

France

EU Contribution

€ 185 441

STMICROELECTRONICS CROLLES 2 SAS

France

EU Contribution

€ 85 262

COMMISSARIAT A L ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

France

EU Contribution

€ 848 849

MAGYAR TUDOMANYOS AKADEMIA TERMESZETTUDOMANYI KUTATOKOZPONT

Hungary

EU Contribution

€ 10 390

MAGYAR TUDOMANYOS AKADEMIA ENERGIATUDOMANYI KUTATOKOZPONT

Hungary

EU Contribution

€ 64 488

INTEL ELECTRONICS LTD

Israel

EU Contribution

€ 43 200

APPLIED MATERIALS ISRAEL LTD

Israel

EU Contribution

€ 372 600

ASM INTERNATIONAL N.V.

Netherlands

EU Contribution

€ 400 182

NEDERLANDSE ORGANISATIE VOOR TOEGEPAST NATUURWETENSCHAPPELIJK ONDERZOEK TNO

Netherlands

EU Contribution

€ 107 092

Project information

Grant agreement ID: 611332

Status

Closed project

  • Start date

    1 November 2013

  • End date

    30 April 2017

Funded under:

FP7-ICT

  • Overall budget:

    € 11 044 123

  • EU contribution

    € 7 214 989

Coordinated by:

FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.

Germany