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Preparing R2 extension to 300mm for BCD Smart Power

Preparing R2 extension to 300mm for BCD Smart Power

Objective

R2POWER300 is committed to challenge the following Objectives:
• Development and manufacturing of a multi-KET Pilot Line
(i.e. Nanoelectronics, Nanotechnology, Advanced Manufacturing)
• Energy Efficiency and CO2 Reduction megatrends.

The project aims to achieve the following Goals:
1. Set the stage for the future extension to 300mm of the R2 Fab facility located in Agrate Brianza (Italy) - i.e. line’s specification, tools’ evaluation and screening, new process’s optimization and characterization, etc.
2. To evaluate, characterize and optimize the equipments and process necessary to achieve the new BCD10 technology, featuring 90nm lithography, at 300mm wafer size. BCD (i.e. Bipolar + CMOS + DMOS) is a unique smart power technology invented by ST in the mid ‘80s (CMOS’s gate length was 4 m at that time!). As of today BCD is one of the key technology assets of ST and the indefatigable evolution and challenging roadmap makes ST a world-class leader on smart power ICs.
3. Advanced System in Packages: some SiP activity will be performed, with specific reference to Sintering based die-attach, thermal analysis and dedicated packaging solution for high density ALD capacitors.

Coordinator

STMICROELECTRONICS SRL

Address

Via C.Olivetti 2
20864 Agrate Brianza

Italy

Activity type

Private for-profit entities (excluding Higher or Secondary Education Establishments)

EU Contribution

€ 1 451 930,74

Participants (10)

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L.P.E. SPA

Italy

EU Contribution

€ 161 759,82

POLITECNICO DI TORINO

Italy

EU Contribution

€ 59 067,03

CONSORZIO NAZIONALE INTERUNIVERSITARIO PER LA NANOELETTRONICA

Italy

EU Contribution

€ 97 115

UNIVERSITA DI PISA

Italy

EU Contribution

€ 51 442,60

CONSIGLIO NAZIONALE DELLE RICERCHE

Italy

EU Contribution

€ 75 403,76

ASM EUROPE BV

Netherlands

Besi Netherlands BV

Netherlands

EU Contribution

€ 49 681,50

NANO DESIGN SRO

Slovakia

EU Contribution

€ 68 034,99

PICOSUN OY

Finland

EU Contribution

€ 28 837

ASM EUROPE BV

Netherlands

EU Contribution

€ 17 000

Project information

Grant agreement ID: 653933

Status

Closed project

  • Start date

    1 July 2015

  • End date

    31 December 2018

Funded under:

H2020-EU.2.1.1.7.

  • Overall budget:

    € 8 173 781,35

  • EU contribution

    € 2 060 272,44

Coordinated by:

STMICROELECTRONICS SRL

Italy