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Seven Nanometer Technology

Objective

The SeNaTe project is the next in a chain of thematically connected ENIAC JU KET pilot line projects which are associated with 450mm/300mm development for the 12nm and 10nm technology nodes. The main objective is the demonstration of the 7nm IC technology integration in line with the industry needs and the ITRS roadmap on real devices in the Advanced Patterning Center at imec using innovative device architecture and comprising demonstration of a lithographic platform for EUV and immersion technology, advanced process and holistic metrology platforms, new materials and mask infrastructure.
A lithography scanner will be developed based on EUV technology to achieve the 7nm module patterning specification. Metrology platforms need to be qualified for N7’s 1D, 2D and 3D geometries with the appropriate precision and accuracy. For the 7nm technology modules a large number of new materials will need to be introduced. The introduction of these new materials brings challenges for all involved processes and the related equipment set. Next to new deposition processes also the interaction of the involved materials with subsequent etch, clean and planarization steps will be studied. Major European stakeholders in EUV mask development will collaboratively work together on a number of key remaining EUV mask issues.
The first two years of the project will be dedicated to find the best options for patterning, device performance, and integration. In the last year a full N7 integration with electrical measurements will be performed to enable the validation of the 7nm process options for a High Volume Manufacturing.
The SeNaTe project relates to the ECSEL work program topic Process technologies – More Moore. It addresses and targets as set out in the MASP at the discovery of new Semiconductor Process, Equipment and Materials solutions for advanced CMOS processes that enable the nano-structuring of electronic devices with 7nm resolution in high-volume manufacturing and fast prototyping.

Coordinator

ASML NETHERLANDS B.V.
Net EU contribution
€ 8 557 804,00
Address
De Run 6501
5504DR Veldhoven
Netherlands

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Region
Noord-Brabant Zuidoost-Noord-Brabant
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 8 557 804,00

Participants (51)

PFEIFFER VACUUM
France
Net EU contribution
€ 117 344,50
Address
98 Avenue De Brogny
74000 Annecy

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Region
Auvergne-Rhône-Alpes Rhône-Alpes Haute-Savoie
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 117 344,50
APPLIED MATERIALS BELGIUM
Belgium
Net EU contribution
€ 517 968,75
Address
Kapeldreef 75 Bus C1
3001 Leuven

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Region
Vlaams Gewest Prov. Vlaams-Brabant Arr. Leuven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 517 968,75
APPLIED MATERIALS ISRAEL LTD
Israel
Net EU contribution
€ 940 967,49
Address
Oppenheimer Street 9
76705 Rehovot

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Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 940 967,49
ADVANCED MASK TECHNOLOGY CENTER GMBH & CO KG
Germany
Net EU contribution
€ 382 500,00
Address
Rahnitzer Allee 9
1109 Dresden

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Region
Baden-Württemberg Stuttgart Stuttgart, Stadtkreis
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 382 500,00
ASELTA NANOGRAPHICS SA
France
Net EU contribution
€ 118 796,60
Address
Parvis Louis Neel 7
38000 Grenoble

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SME

The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.

Yes
Region
Auvergne-Rhône-Alpes Rhône-Alpes Isère
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 118 796,60
ASM BELGIUM NV
Belgium
Net EU contribution
€ 446 245,15
Address
Kapeldreef 75
3001 Heverlee

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Region
Vlaams Gewest Prov. Vlaams-Brabant Arr. Leuven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 446 245,15
ASM EUROPE BV

Participation ended

Netherlands
Net EU contribution
€ 0,00
Address
Versterkerstraat 8
1322 AP Almere
Region
Oost-Nederland Flevoland Flevoland
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 0,00
ASYS AUTOMATIC SYSTEMS GMBH & CO KG
Germany
Net EU contribution
€ 81 421,50
Address
Grafenbergweg 20
73614 Schorndorf

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SME

The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.

Yes
Region
Baden-Württemberg Stuttgart Rems-Murr-Kreis
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 81 421,50
RI RESEARCH INSTRUMENTS GMBH
Germany
Net EU contribution
€ 217 425,36
Address
Friedrich Ebert Strasse 1
51429 Bergisch Gladbach

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Region
Nordrhein-Westfalen Köln Rheinisch-Bergischer Kreis
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 217 425,36
BROOKS CCS GMBH

Participation ended

Germany
Net EU contribution
€ 2 577,97
Address
Im Wiesengrund 17
78315 Radolfzell
Region
Baden-Württemberg Freiburg Konstanz
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 2 577,97
COVENTOR SARL
France
Net EU contribution
€ 306 038,20
Address
Avenue Du Quebec 3
91140 Villebon Sur Yvette

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SME

The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.

Yes
Region
Ile-de-France Ile-de-France Essonne
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 306 038,20
DEMCON ADVANCED MECHATRONICS ENSCHEDE B.V.
Netherlands
Net EU contribution
€ 139 245,38
Address
Institutenweg 25
7521 PH Enschede

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SME

The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.

Yes
Region
Oost-Nederland Overijssel Twente
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 139 245,38
Third-party

Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure.

DEMCON PRODUCTION BV
Netherlands
Net EU contribution
€ 5 239,81
Address
Institutenweg 25
7521 PH Enschede

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Region
Oost-Nederland Overijssel Twente
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 5 239,81
Third-party

Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure.

DEMCON ADVANCED MECHATRONICS BESTB.V.
Netherlands
Net EU contribution
€ 68 703,39
Address
Kanaaldijk 29
5683 CR Best

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Region
Noord-Brabant Zuidoost-Noord-Brabant
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 68 703,39
Third-party

Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure.

DEMCON FLEX CENTER BV
Netherlands
Net EU contribution
€ 9 886,80
Address
Institutenweg 25
7521PH Enschede

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Region
Oost-Nederland Overijssel Twente
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 9 886,80
Third-party

Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure.

DEMCON MACAWI RESPIRATORY SYSTEMS BV

Participation ended

Netherlands
Net EU contribution
€ 0,00
Address
Institutenweg 25
7521 PH Enschede
Region
Oost-Nederland Overijssel Twente
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 0,00
Third-party

Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure.

IDEON TWENTE B.V.
Netherlands
Net EU contribution
€ 12 039,18
Address
Institutenweg 25
7521 PH Enschede

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Region
Oost-Nederland Overijssel Twente
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 12 039,18
Third-party

Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure.

DEMCON BUNOVA B.V.
Netherlands
Net EU contribution
€ 1 021,33
Address
Institutenweg 25
7521 PH Enschede

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Region
Oost-Nederland Overijssel Twente
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 1 021,33
ECP
France
Net EU contribution
€ 30 187,95
Address
Rue Louis Lepine 395 Le Millenaire
34000 Montpellier

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SME

The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.

Yes
Region
Occitanie Languedoc-Roussillon Hérault
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 30 187,95
FEI CZECH REPUBLIC SRO
Czechia
Net EU contribution
€ 121 988,09
Address
Pecha 1282/12
627 00 Brno

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Region
Jihovýchod Jihomoravský kraj
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 121 988,09
FEI ELECTRON OPTICS BV
Netherlands
Net EU contribution
€ 787 475,00
Address
Achtseweg Noord Gebouw Aae 5
5651 GG Eindhoven

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Region
Noord-Brabant Zuidoost-Noord-Brabant
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 787 475,00
FRAUNHOFER GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG EV
Germany
Net EU contribution
€ 676 624,34
Address
Hansastrasse 27c
80686 Munchen

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Region
Bayern Oberbayern München, Kreisfreie Stadt
Activity type
Research Organisations
Other funding
€ 676 624,34
FABMATICS GMBH
Germany
Net EU contribution
€ 195 136,20
Address
Zur Steinhoehe 1
01109 Dresden

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SME

The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.

Yes
Region
Sachsen Dresden Dresden, Kreisfreie Stadt
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 195 136,20
HERAEUS QUARZGLAS GMBH & CO KG

Participation ended

Germany
Net EU contribution
€ 0,00
Address
Quarzstrasse 8
63450 Hanau
Region
Darmstadt Main-Kinzig-Kreis
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 0,00
ICT Integrated Circuit Testing GmbH
Germany
Net EU contribution
€ 765 000,00
Address
Ammerthalstrasse 20
85551 Heimstetten

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Region
Bayern Oberbayern München, Landkreis
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 765 000,00
INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Belgium
Net EU contribution
€ 7 210 212,40
Address
Kapeldreef 75
3001 Leuven

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Region
Vlaams Gewest Prov. Vlaams-Brabant Arr. Leuven
Activity type
Research Organisations
Other funding
€ 7 210 212,40
INSTITUT FUER MIKROELEKTRONIK STUTTGART
Germany
Net EU contribution
€ 845 982,00
Address
Allmandring Strasse 30a
70569 Stuttgart

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Region
Baden-Württemberg Stuttgart Stuttgart, Stadtkreis
Activity type
Research Organisations
Other funding
€ 845 982,00
INTEL ELECTRONICS LTD

Participation ended

Israel
Net EU contribution
€ 0,00
Address
Haavats Str. 11
82109 Kiryat Gat
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 0,00
Third-party

Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure.

Intel Corporation

Participation ended

United States
Net EU contribution
€ 0,00
Address
Orange Street 1209
19801 Wilmington New Castle De
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 0,00
JENOPTIK OPTICAL SYSTEMS GMBH
Germany
Net EU contribution
€ 346 071,00
Address
Goschwitzer Strasse 25
07745 Jena

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Region
Thüringen Thüringen Jena, Kreisfreie Stadt
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 346 071,00
BRUKER TECHNOLOGIES LTD
Israel
Net EU contribution
€ 448 302,50
Address
6 Hamechkar Street Ramat Gavriel Industrial Zone
2306990 Migdal Haemek

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SME

The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.

Yes
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 448 302,50
Third-party

Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure.

Jordan Valley Semiconductors UK Ltd
United Kingdom
Net EU contribution
€ 215 291,50
Address
Belmont Business Park Belmont
DH1 1TW Durham

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SME

The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.

Yes
Region
North East (England) Tees Valley and Durham Durham CC
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 215 291,50
Third-party

Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure.

BRUKER AXS GMBH
Germany
Net EU contribution
€ 31 642,00
Address
Ostliche Rheinbruckenstrasse 49
76187 Karlsruhe

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Region
Baden-Württemberg Karlsruhe Karlsruhe, Stadtkreis
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 31 642,00
KLA-Tencor MIE GmbH
Germany
Net EU contribution
€ 182 704,00
Address
Kubacher Weg 4
35781 Weilburg

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Region
Gießen Limburg-Weilburg
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 182 704,00
KLA-TENCOR CORPORATION (ISRAEL)
Israel
Net EU contribution
€ 539 676,51
Address
Hatikshoret St.
23100 Migdal Haemek

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Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 539 676,51
LAM RESEARCH AG
Austria
Net EU contribution
€ 528 653,45
Address
Sez-strasse 1
9500 Villach

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Region
Südösterreich Kärnten Klagenfurt-Villach
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 528 653,45
LAM RESEARCH BELGIUM
Belgium
Net EU contribution
€ 445 140,15
Address
Kapeldreef 75
3001 Leuven

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Region
Vlaams Gewest Prov. Vlaams-Brabant Arr. Leuven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 445 140,15
NANOMOTION LTD
Israel
Net EU contribution
€ 389 314,22
Address
Mordot Hacarmel Industrial Park 3 Hayetsira St
20692 Yokneam

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Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 389 314,22
NOVA LTD
Israel
Net EU contribution
€ 1 075 348,88
Address
5 David Fikes St
76100 Rehovot

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Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 1 075 348,88
PHYSIKALISCH-TECHNISCHE BUNDESANSTALT
Germany
Net EU contribution
€ 113 692,00
Address
Bundesallee 100
38116 Braunschweig

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Region
Niedersachsen Braunschweig Braunschweig, Kreisfreie Stadt
Activity type
Research Organisations
Other funding
€ 113 692,00
RECIF TECHNOLOGIES
France
Net EU contribution
€ 83 872,75
Address
Rue Des Briquetiers 9
31700 Blagnac

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SME

The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.

Yes
Region
Occitanie Midi-Pyrénées Haute-Garonne
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 83 872,75
SEMILAB FELVEZETO FIZIKAI LABORATORIUM ZARTKORUEN MUKODO RESZVENYTARSASAG
Hungary
Net EU contribution
€ 127 380,00
Address
Prielle Kornelia Utca 4/a.
1117 Budapest

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Region
Közép-Magyarország Budapest Budapest
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 127 380,00
SOITEC SA
France
Net EU contribution
€ 116 553,45
Address
Parc Tec No Des Fontaines Chemin De Franques
38190 Bernin

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Region
Auvergne-Rhône-Alpes Rhône-Alpes Isère
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 116 553,45
SUSS MicroTec Photomask Equipment GmbH & Co. KG
Germany
Net EU contribution
€ 102 451,86
Address
Ferdinand-von-steinbeis-ring 10
75447 Sternenfels

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SME

The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.

Yes
Region
Baden-Württemberg Karlsruhe Enzkreis
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 102 451,86
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST NATUURWETENSCHAPPELIJK ONDERZOEK TNO
Netherlands
Net EU contribution
€ 1 151 729,80
Address
Anna Van Buerenplein 1
2595 DA Den Haag

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Region
West-Nederland Zuid-Holland Agglomeratie ’s-Gravenhage
Activity type
Research Organisations
Other funding
€ 1 151 729,80
UNIVERSITEIT TWENTE
Netherlands
Net EU contribution
€ 575 000,00
Address
Drienerlolaan 5
7522 NB Enschede

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Region
Oost-Nederland Overijssel Twente
Activity type
Higher or Secondary Education Establishments
Other funding
€ 575 000,00
VDL ENABLING TECHNOLOGIES GROUP BV
Netherlands
Net EU contribution
€ 40 359,50
Address
Hoevenweg 1
5652 AW Eindhoven

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Region
Noord-Brabant Zuidoost-Noord-Brabant
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 40 359,50
Third-party

Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure.

VDL ENABLING TECHNOLOGIES GROUP EINDHOVEN BV
Netherlands
Net EU contribution
€ 328 453,00
Address
Achtseweg Noord 5 Ak-1 K113
5651 GG Eindhoven

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Region
Noord-Brabant Zuidoost-Noord-Brabant
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 328 453,00
Third-party

Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure.

VDL ETG TECHNOLOGY & DEVELOPMENT BV
Netherlands
Net EU contribution
€ 48 000,00
Address
Schakel 22
5651 GH Eindhoven

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Region
Noord-Brabant Zuidoost-Noord-Brabant
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 48 000,00
CARL ZEISS SMT GMBH
Germany
Net EU contribution
€ 2 357 990,52
Address
Rudolf Eber Strasse 2
73447 Oberkochen

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Region
Baden-Württemberg Stuttgart Ostalbkreis
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 2 357 990,52
ASM EUROPE BV
Netherlands
Net EU contribution
€ 10 928,45
Address
Versterkerstraat 8
1322 AP Almere

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Region
Oost-Nederland Flevoland Flevoland
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 10 928,45