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Seven Nanometer Technology

Objective

The SeNaTe project is the next in a chain of thematically connected ENIAC JU KET pilot line projects which are associated with 450mm/300mm development for the 12nm and 10nm technology nodes. The main objective is the demonstration of the 7nm IC technology integration in line with the industry needs and the ITRS roadmap on real devices in the Advanced Patterning Center at imec using innovative device architecture and comprising demonstration of a lithographic platform for EUV and immersion technology, advanced process and holistic metrology platforms, new materials and mask infrastructure.
A lithography scanner will be developed based on EUV technology to achieve the 7nm module patterning specification. Metrology platforms need to be qualified for N7’s 1D, 2D and 3D geometries with the appropriate precision and accuracy. For the 7nm technology modules a large number of new materials will need to be introduced. The introduction of these new materials brings challenges for all involved processes and the related equipment set. Next to new deposition processes also the interaction of the involved materials with subsequent etch, clean and planarization steps will be studied. Major European stakeholders in EUV mask development will collaboratively work together on a number of key remaining EUV mask issues.
The first two years of the project will be dedicated to find the best options for patterning, device performance, and integration. In the last year a full N7 integration with electrical measurements will be performed to enable the validation of the 7nm process options for a High Volume Manufacturing.
The SeNaTe project relates to the ECSEL work program topic Process technologies – More Moore. It addresses and targets as set out in the MASP at the discovery of new Semiconductor Process, Equipment and Materials solutions for advanced CMOS processes that enable the nano-structuring of electronic devices with 7nm resolution in high-volume manufacturing and fast prototyping.

Call for proposal

ECSEL-2014-2
See other projects for this call

Funding Scheme

ECSEL-IA - ECSEL Innovation Action

Coordinator

ASML NETHERLANDS B.V.
Address
De Run 6501
5504DR Veldhoven
Netherlands
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
EU contribution
€ 8 557 804

Participants (40)

PFEIFFER VACUUM
France
EU contribution
€ 117 344,50
Address
98 Avenue De Brogny
74000 Annecy
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
APPLIED MATERIALS BELGIUM
Belgium
EU contribution
€ 517 968,75
Address
Kapeldreef 75 Bus C1
3001 Leuven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
APPLIED MATERIALS ISRAEL LTD
Israel
EU contribution
€ 940 967,49
Address
Oppenheimer Street 9
76705 Rehovot
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
ADVANCED MASK TECHNOLOGY CENTER GMBH & CO KG
Germany
EU contribution
€ 382 500
Address
Rahnitzer Allee 9
1109 Dresden
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
ASELTA NANOGRAPHICS SA
France
EU contribution
€ 118 796,60
Address
Parvis Louis Neel 7
38000 Grenoble
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
ASM BELGIUM NV
Belgium
EU contribution
€ 446 245,15
Address
Kapeldreef 75
3001 Heverlee
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
ASM EUROPE BV

Participation ended

Netherlands
EU contribution
€ 0
Address
Versterkerstraat 8
1322 AP Almere
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
ASYS AUTOMATIC SYSTEMS GMBH & CO KG
Germany
EU contribution
€ 81 421,50
Address
Grafenbergweg 20
73614 Schorndorf
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
RI RESEARCH INSTRUMENTS GMBH
Germany
EU contribution
€ 217 425,36
Address
Friedrich Ebert Strasse 1
51429 Bergisch Gladbach
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
BROOKS CCS GMBH

Participation ended

Germany
EU contribution
€ 2 577,97
Address
Im Wiesengrund 17
78315 Radolfzell
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
COVENTOR SARL
France
EU contribution
€ 306 038,20
Address
Avenue Du Quebec 3
91140 Villebon Sur Yvette
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
DEMCON ADVANCED MECHATRONICS ENSCHEDE B.V.
Netherlands
EU contribution
€ 236 135,89
Address
Institutenweg 25
7521 PH Enschede
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
ECP
France
EU contribution
€ 30 187,95
Address
Rue Louis Lepine 395 Le Millenaire
34000 Montpellier
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
FEI CZECH REPUBLIC SRO
Czechia
EU contribution
€ 121 988,09
Address
Pecha 1282/12
627 00 Brno
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
FEI ELECTRON OPTICS BV
Netherlands
EU contribution
€ 787 475
Address
Achtseweg Noord Gebouw Aae 5
5651 GG Eindhoven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
Germany
EU contribution
€ 676 624,34
Address
Hansastrasse 27C
80686 Munchen
Activity type
Research Organisations
FABMATICS GMBH
Germany
EU contribution
€ 195 136,20
Address
Zur Steinhoehe 1
01109 Dresden
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
HERAEUS QUARZGLAS GMBH & CO KG

Participation ended

Germany
EU contribution
€ 0
Address
Quarzstrasse 8
63450 Hanau
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
ICT Integrated Circuit Testing GmbH
Germany
EU contribution
€ 765 000
Address
Ammerthalstrasse 20
85551 Heimstetten
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Belgium
EU contribution
€ 7 210 212,40
Address
Kapeldreef 75
3001 Leuven
Activity type
Research Organisations
INSTITUT FUER MIKROELEKTRONIK STUTTGART
Germany
EU contribution
€ 845 982
Address
Allmandring Strasse 30A
70569 Stuttgart
Activity type
Research Organisations
INTEL ELECTRONICS LTD

Participation ended

Israel
EU contribution
€ 0
Address
Haavats Str. 11
82109 Kiryat Gat
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
JENOPTIK OPTICAL SYSTEMS GMBH
Germany
EU contribution
€ 346 071
Address
Goschwitzer Strasse 25
07745 Jena
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
BRUKER TECHNOLOGIES LTD
Israel
EU contribution
€ 695 236
Address
6 Hamechkar Street Ramat Gavriel Industrial Zone
2306990 Migdal Haemek
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
KLA-Tencor MIE GmbH
Germany
EU contribution
€ 182 704
Address
Kubacher Weg 4
35781 Weilburg
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
KLA-TENCOR CORPORATION (ISRAEL)
Israel
EU contribution
€ 539 676,51
Address
Hatikshoret St.
23100 Migdal Haemek
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
LAM RESEARCH AG
Austria
EU contribution
€ 528 653,45
Address
Sez-strasse 1
9500 Villach
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
LAM RESEARCH BELGIUM
Belgium
EU contribution
€ 445 140,15
Address
Kapeldreef 75
3001 Leuven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
NANOMOTION LTD
Israel
EU contribution
€ 389 314,22
Address
Mordot Hacarmel Industrial Park 3 Hayetsira St
20692 Yokneam
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
NOVA MEASURING INSTRUMENTS LTD
Israel
EU contribution
€ 1 075 348,88
Address
Weizmann Science Park Building 22
76100 Rehovot
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
PHYSIKALISCH-TECHNISCHE BUNDESANSTALT
Germany
EU contribution
€ 113 692
Address
Bundesallee 100
38116 Braunschweig
Activity type
Research Organisations
RECIF TECHNOLOGIES
France
EU contribution
€ 83 872,75
Address
Rue Des Briquetiers 9
31700 Blagnac
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
SEMILAB FELVEZETO FIZIKAI LABORATORIUM RESZVENYTARSASAG
Hungary
EU contribution
€ 127 380
Address
Prielle Kornelia Utca 4/A.
1117 Budapest
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
SOITEC SA
France
EU contribution
€ 116 553,45
Address
Chemin Des Franques - Parc Technologique Des Fontaines
38190 Bernin
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
SUSS MicroTec Photomask Equipment GmbH & Co. KG
Germany
EU contribution
€ 102 451,86
Address
Ferdinand-von-steinbeis-ring 10
75447 Sternenfels
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST NATUURWETENSCHAPPELIJK ONDERZOEK TNO
Netherlands
EU contribution
€ 1 151 729,80
Address
Anna Van Buerenplein 1
2595 DA Den Haag
Activity type
Research Organisations
UNIVERSITEIT TWENTE
Netherlands
EU contribution
€ 575 000
Address
Drienerlolaan 5
7522 NB Enschede
Activity type
Higher or Secondary Education Establishments
VDL ENABLING TECHNOLOGIES GROUP BV
Netherlands
EU contribution
€ 416 812,50
Address
Hoevenweg 1
5652 AW Eindhoven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
CARL ZEISS SMT GMBH
Germany
EU contribution
€ 2 357 990,52
Address
Rudolf Eber Strasse 2
73447 Oberkochen
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
ASM EUROPE BV
Netherlands
EU contribution
€ 10 928,45
Address
Versterkerstraat 8
1322 AP Almere
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)