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Stability Under Process Variability for Advanced Interconnects and Devices Beyond 7 nm node

Stability Under Process Variability for Advanced Interconnects and Devices Beyond 7 nm node

Objective

Among the physical limitations which challenge progress in nanoelectronics for aggressively scaled More Moore, process variability is getting ever more critical. Effects from various sources of process variations, both systematic and stochastic, influence each other and lead to variations of the electrical, thermal and mechanical behavior of devices, interconnects and circuits. Correlations are of key importance because they drastically affect the percentage of products which meet the specifications. Whereas the comprehensive experimental investigation of these effects is largely impossible, modelling and simulation (TCAD) offers the unique possibility to predefine process variations and trace their effects on subsequent process steps and on devices and circuits fabricated, just by changing the corresponding input data. This important requirement for and capability of simulation is among others highlighted in the International Technology Roadmap for Semiconductors ITRS.
SUPERAID7 will build upon the successful FP7 project SUPERTHEME which focused on advanced More-than-Moore devices, and will establish a software system for the simulation of the impact of systematic and statistical process variations on advanced More Moore devices and circuits down to the 7 nm node and below, including especially interconnects. This will need improved physical models and extended compact models. Device architectures addressed in the benchmarks include especially TriGate/ΩGate FETs and stacked nanowires, including alternative channel materials. The software developed will be benchmarked utilizing background and sideground experiments of the partner CEA. Main channels for exploitation will be software commercialization via the partner GSS and support of device architecture activities at CEA. Furthermore, an Industrial Advisory Board initially consisting of GLOBALFOUNDRIES and STMicroelectronics will contribute to the specifications and will get early access to the project results.
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Coordinator

FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.

Address

Hansastrasse 27c
80686 Munchen

Germany

Activity type

Research Organisations

EU Contribution

€ 970 600

Participants (5)

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Gold Standard Simulations ltd

United Kingdom

EU Contribution

€ 382 877,83

COMMISSARIAT A L ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

France

EU Contribution

€ 621 122,50

UNIVERSITY OF GLASGOW

United Kingdom

EU Contribution

€ 598 205

TECHNISCHE UNIVERSITAET WIEN

Austria

EU Contribution

€ 534 250

SYNOPSYS (NORTHERN EUROPE) LIMITED

United Kingdom

EU Contribution

€ 270 472,17

Project information

Grant agreement ID: 688101

Status

Closed project

  • Start date

    1 January 2016

  • End date

    31 December 2018

Funded under:

H2020-EU.2.1.1.

  • Overall budget:

    € 3 377 527,50

  • EU contribution

    € 3 377 527,50

Coordinated by:

FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.

Germany