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Metrology for future 3D-technologies

Objective

Within the food chain of equipment delivery for the semiconductor industry, Europe has kept a very strong position in the metrology area with many companies establishing themselves as main leaders in the field. Hence in line with the objectives of the ICT25 call for innovation action to overcome the (initial) barriers for the successful commercialization of novel European products, this project aims at exploring for a number of metrology solutions their technological readiness, reliability and relevance of the developed protocols, and the COO. The portfolio within the project covers new metrology concepts addressing specifically the processing challenges linked to 3D-Devices and range from probing basic layer properties (composition, electrical properties) in FEOL to control of metallization in BEOL up to issues linked to die stacking.
Due to the specific processing steps which need to be addressed, three separate metrology tools will be assessed in this project i.e a Tofsims system (IonTOF) with build-in Scanning Probe stage and FIB column for true 3D-composition profiling, a completely automated micro-Hall and sheet resistance measurement tool (Capres) with additional capabilities for measurements on dedicated test structures (prior to full BEOL) and an GHz acoustic Microscope (Tepla) for probing voids in TSV’s and stacked dies. As some of them (IonTOf, Capres) are addressing partly complementary information (composition versus electrical properties), their co-existence in this project creates additional value as beyond the tool assessment also a methodology based on combining these concepts can be explored and certified. Moreover a significant efficiency gain is created as they can employ similar test structures and devices. For each of these tools, the basic metrology concepts are existing and validated in the lab on selected applications but their general applicability field within the semiconductor industry still needs to be established

Coordinator

INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Net EU contribution
€ 1 137 903,75
Address
Kapeldreef 75
3001 Leuven
Belgium

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Region
Vlaams Gewest Prov. Vlaams-Brabant Arr. Leuven
Activity type
Research Organisations
Non-EU contribution
€ 0,00

Participants (9)

COMMISSARIAT A L ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
France
Net EU contribution
€ 249 221,25
Address
Rue Leblanc 25
75015 Paris 15

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Region
Ile-de-France Ile-de-France Paris
Activity type
Research Organisations
Non-EU contribution
€ 0,00
FRAUNHOFER GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG EV
Germany
Net EU contribution
€ 246 325,00
Address
Hansastrasse 27c
80686 Munchen

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Region
Bayern Oberbayern München, Kreisfreie Stadt
Activity type
Research Organisations
Non-EU contribution
€ 0,00
MATERIALS CENTER LEOBEN FORSCHUNG GMBH
Austria
Net EU contribution
€ 234 136,25
Address
Roseggerstrasse 12
8700 Leoben

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SME

The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.

Yes
Region
Südösterreich Steiermark Östliche Obersteiermark
Activity type
Research Organisations
Non-EU contribution
€ 0,00
DANMARKS TEKNISKE UNIVERSITET
Denmark
Net EU contribution
€ 300 473,75
Address
Anker Engelundsvej 1 Bygning 101 A
2800 Kgs Lyngby

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Region
Danmark Hovedstaden Københavns omegn
Activity type
Higher or Secondary Education Establishments
Non-EU contribution
€ 0,00
EIDGENOSSISCHE MATERIALPRUFUNGS- UND FORSCHUNGSANSTALT
Switzerland
Net EU contribution
€ 0,00
Address
Ueberlandstrasse 129
8600 Dubendorf

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Region
Schweiz/Suisse/Svizzera Zürich Zürich
Activity type
Higher or Secondary Education Establishments
Non-EU contribution
€ 437 503,75
IONTOF TECHNOLOGIES GMBH
Germany
Net EU contribution
€ 117 600,00
Address
Heisenbergstrasse 15
48149 Munster

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SME

The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.

Yes
Region
Nordrhein-Westfalen Münster Münster, Kreisfreie Stadt
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 50 400,00
CAPRES AS
Denmark
Net EU contribution
€ 301 875,00
Address
Diplomvej 373
2800 Kgs. Lyngby

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SME

The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.

Yes
Region
Danmark Hovedstaden Københavns omegn
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 129 375,00
PVA TEPLA ANALYTICAL SYSTEMS GMBH
Germany
Net EU contribution
€ 101 500,00
Address
Deutschordenstrasse 38
73463 Westhausen

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Region
Baden-Württemberg Stuttgart Ostalbkreis
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 43 500,00
LAM RESEARCH BELGIUM
Belgium
Net EU contribution
€ 0,00
Address
Kapeldreef 75
3001 Leuven

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Region
Vlaams Gewest Prov. Vlaams-Brabant Arr. Leuven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 0,00