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3D Advanced Metrology and materials for advanced devices

Objective

The objective of the 3DAM project is to develop a new generation of metrology and characterization tools and methodologies enabling the development of the next semiconductor technology nodes. As nano-electronics technology is moving beyond the boundaries of (strained) silicon in planar or finFETs, new 3D device architectures and new materials bring major metrology and characterization challenges which cannot be met by pushing the present techniques to their limits.

3DAM will be a path-finding project which supports and complements several existing and future ECSEL pilot-line projects and is linked to the MASP area 7.1 (subsection More Moore). Innovative demonstrators and methodologies will be built and evaluated within the themes of metrology and characterization of 3D device architectures and new materials, across the full IC manufacturing cycle from Front to Back-End-Of-Line. 3D structural metrology and defect analysis techniques will be developed and correlated to address challenges around 3D CD, strain and crystal defects at the nm scale. 3D compositional analysis and electrical properties will be investigated with special attention to interfaces, alloys and 2D materials. The project will develop new workflows combining different technologies for more reliable and faster results; fit for use in future semiconductor processes.

The consortium includes major European semiconductor equipment companies in the area of metrology and characterization. The link to future needs of the industry, as well as critical evaluation of concepts and demonstrators, is ensured by the participation of IMEC and LETI. The project will directly increase the competitiveness of the strong Europe-based semiconductor Equipment industry. Closely connected European IC manufacturers will benefit by accelerated R&D and process ramp-up. The project will generate technologies essential for future semiconductor processes and for the applications enabled by the new technology nodes.

Field of science

  • /natural sciences/physical sciences/electromagnetism and electronics/electrical conductivity/semiconductor

Call for proposal

H2020-ECSEL-2015-1-RIA-two-stage
See other projects for this call

Funding Scheme

ECSEL-RIA - ECSEL Research and Innovation Action

Coordinator

FEI ELECTRON OPTICS BV
Address
Achtseweg Noord Gebouw Aae 5
5651 GG Eindhoven
Netherlands
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
EU contribution
€ 1 110 812,50

Participants (16)

APPLIED MATERIALS ISRAEL LTD
Israel
EU contribution
€ 740 625
Address
Oppenheimer Street 9
76705 Rehovot
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Belgium
EU contribution
€ 873 666
Address
Kapeldreef 75
3001 Leuven
Activity type
Research Organisations
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST NATUURWETENSCHAPPELIJK ONDERZOEK TNO
Netherlands
EU contribution
€ 628 813
Address
Anna Van Buerenplein 1
2595 DA Den Haag
Activity type
Research Organisations
NOVA MEASURING INSTRUMENTS LTD
Israel
EU contribution
€ 600 000
Address
Weizmann Science Park Building 22
76100 Rehovot
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
BRUKER TECHNOLOGIES LTD
Israel
EU contribution
€ 381 093,75
Address
6 Hamechkar Street Ramat Gavriel Industrial Zone
2306990 Migdal Haemek
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
COMMISSARIAT A L ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
France
EU contribution
€ 525 062,50
Address
Rue Leblanc 25
75015 Paris 15
Activity type
Research Organisations
ATTOLIGHT SA
Switzerland
EU contribution
€ 0
Address
Epfl Innovation Park Building D
1015 Lausanne
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
SEMILAB FELVEZETO FIZIKAI LABORATORIUM RESZVENYTARSASAG
Hungary
EU contribution
€ 531 250
Address
Prielle Kornelia Utca 4/A.
1117 Budapest
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
CAMECA
France
EU contribution
€ 344 562,50
Address
Quai De Gresillons 29
92622 Gennevilliers
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
ADAMA INNOVATIONS LIMITED

Participation ended

Ireland
EU contribution
€ 90 810,38
Address
Crann Trinity College Dublin
2 Dublin
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
FEI SAS
France
EU contribution
€ 207 500
Address
Impasse Rudolf Diesel 3
33700 Merignac
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
STMICROELECTRONICS CROLLES 2 SAS
France
EU contribution
€ 0
Address
Rue Jean Monnet 850
38920 Crolles
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
TECHNISCHE UNIVERSITEIT EINDHOVEN
Netherlands
EU contribution
€ 145 179,50
Address
Groene Loper 3
5612 AE Eindhoven
Activity type
Higher or Secondary Education Establishments
CAPRES AS
Denmark
EU contribution
€ 77 474,25
Address
Diplomvej 373
2800 Kgs. Lyngby
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
DANMARKS TEKNISKE UNIVERSITET
Denmark
EU contribution
€ 191 258,50
Address
Anker Engelundsvej 1 Bygning 101 A
2800 Kgs Lyngby
Activity type
Higher or Secondary Education Establishments
APPLIED MATERIALS FRANCE
France
EU contribution
€ 15 718,75
Address
864 Chemin Des Fontaines
38190 Bernin
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)