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3D Advanced Metrology and materials for advanced devices

Objective

The objective of the 3DAM project is to develop a new generation of metrology and characterization tools and methodologies enabling the development of the next semiconductor technology nodes. As nano-electronics technology is moving beyond the boundaries of (strained) silicon in planar or finFETs, new 3D device architectures and new materials bring major metrology and characterization challenges which cannot be met by pushing the present techniques to their limits.

3DAM will be a path-finding project which supports and complements several existing and future ECSEL pilot-line projects and is linked to the MASP area 7.1 (subsection More Moore). Innovative demonstrators and methodologies will be built and evaluated within the themes of metrology and characterization of 3D device architectures and new materials, across the full IC manufacturing cycle from Front to Back-End-Of-Line. 3D structural metrology and defect analysis techniques will be developed and correlated to address challenges around 3D CD, strain and crystal defects at the nm scale. 3D compositional analysis and electrical properties will be investigated with special attention to interfaces, alloys and 2D materials. The project will develop new workflows combining different technologies for more reliable and faster results; fit for use in future semiconductor processes.

The consortium includes major European semiconductor equipment companies in the area of metrology and characterization. The link to future needs of the industry, as well as critical evaluation of concepts and demonstrators, is ensured by the participation of IMEC and LETI. The project will directly increase the competitiveness of the strong Europe-based semiconductor Equipment industry. Closely connected European IC manufacturers will benefit by accelerated R&D and process ramp-up. The project will generate technologies essential for future semiconductor processes and for the applications enabled by the new technology nodes.

Call for proposal

H2020-ECSEL-2015-1-RIA-two-stage-Master

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Sub call

H2020-ECSEL-2015-1-RIA-two-stage

Coordinator

FEI ELECTRON OPTICS BV
Net EU contribution
€ 1 110 812,50
Address
Achtseweg Noord Gebouw Aae 5
5651 GG Eindhoven
Netherlands

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Region
Noord-Brabant Zuidoost-Noord-Brabant
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 3 332 437,50

Participants (18)

APPLIED MATERIALS ISRAEL LTD
Israel
Net EU contribution
€ 740 625,00
Address
Oppenheimer Street 9
76705 Rehovot

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Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 2 221 875,00
INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Belgium
Net EU contribution
€ 873 666,00
Address
Kapeldreef 75
3001 Leuven

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Region
Vlaams Gewest Prov. Vlaams-Brabant Arr. Leuven
Activity type
Research Organisations
Other funding
€ 1 310 499,00
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST NATUURWETENSCHAPPELIJK ONDERZOEK TNO
Netherlands
Net EU contribution
€ 628 813,00
Address
Anna Van Buerenplein 1
2595 DA Den Haag

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Region
West-Nederland Zuid-Holland Agglomeratie ’s-Gravenhage
Activity type
Research Organisations
Other funding
€ 943 219,50
NOVA LTD
Israel
Net EU contribution
€ 600 000,00
Address
5 David Fikes St
76100 Rehovot

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Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 1 800 000,00
BRUKER TECHNOLOGIES LTD
Israel
Net EU contribution
€ 276 882,11
Address
6 Hamechkar Street Ramat Gavriel Industrial Zone
2306990 Migdal Haemek

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Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 830 646,33
Third-party

Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure.

Jordan Valley Semiconductors UK Ltd
United Kingdom
Net EU contribution
€ 81 211,64
Address
Belmont Business Park Belmont
DH1 1TW Durham

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SME

The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.

Yes
Region
North East (England) Tees Valley and Durham Durham CC
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 243 634,92
Third-party

Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure.

BRUKER AXS GMBH
Germany
Net EU contribution
€ 23 000,00
Address
Ostliche Rheinbruckenstrasse 49
76187 Karlsruhe

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Region
Baden-Württemberg Karlsruhe Karlsruhe, Stadtkreis
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 69 000,00
COMMISSARIAT A L ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
France
Net EU contribution
€ 525 062,50
Address
Rue Leblanc 25
75015 Paris 15

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Region
Ile-de-France Ile-de-France Paris
Activity type
Research Organisations
Other funding
€ 787 593,75
ATTOLIGHT SA
Switzerland
Net EU contribution
€ 0,00
Address
Epfl Innovation Park Building D
1015 Lausanne

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SME

The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.

Yes
Region
Schweiz/Suisse/Svizzera Région lémanique Vaud
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 715 000,00
SEMILAB FELVEZETO FIZIKAI LABORATORIUM ZARTKORUEN MUKODO RESZVENYTARSASAG
Hungary
Net EU contribution
€ 531 250,00
Address
Prielle Kornelia Utca 4/a.
1117 Budapest

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Region
Közép-Magyarország Budapest Budapest
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 1 593 750,00
CAMECA SAS
France
Net EU contribution
€ 344 562,50
Address
Quai Des Gresillons 23/29
92230 Gennevilliers

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Region
Ile-de-France Ile-de-France Hauts-de-Seine
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 1 033 687,50
ADAMA INNOVATIONS LIMITED

Participation ended

Ireland
Net EU contribution
€ 90 810,38
Address
Crann Trinity College Dublin
2 Dublin
SME

The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.

Yes
Region
Ireland Northern and Western Border
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 211 890,87
FEI SAS
France
Net EU contribution
€ 207 500,00
Address
Impasse Rudolf Diesel 3
33700 Merignac

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Region
Nouvelle-Aquitaine Aquitaine Gironde
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 622 500,00
STMICROELECTRONICS CROLLES 2 SAS
France
Net EU contribution
€ 0,00
Address
Rue Jean Monnet 850
38920 Crolles

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Region
Auvergne-Rhône-Alpes Rhône-Alpes Isère
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 143 750,00
TECHNISCHE UNIVERSITEIT EINDHOVEN
Netherlands
Net EU contribution
€ 145 179,50
Address
Groene Loper 3
5612 AE Eindhoven

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Region
Noord-Brabant Zuidoost-Noord-Brabant
Activity type
Higher or Secondary Education Establishments
Other funding
€ 217 769,25
CAPRES AS
Denmark
Net EU contribution
€ 77 474,25
Address
Diplomvej 373
2800 Kgs. Lyngby

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SME

The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.

Yes
Region
Danmark Hovedstaden Københavns omegn
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 180 773,25
DANMARKS TEKNISKE UNIVERSITET
Denmark
Net EU contribution
€ 191 258,50
Address
Anker Engelunds Vej 101
2800 Kongens Lyngby

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Region
Danmark Hovedstaden Københavns omegn
Activity type
Higher or Secondary Education Establishments
Other funding
€ 286 887,75
APPLIED MATERIALS FRANCE
France
Net EU contribution
€ 15 718,75
Address
864 Chemin Des Fontaines
38190 Bernin

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Region
Auvergne-Rhône-Alpes Rhône-Alpes Isère
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 47 156,25