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Technology Advances and Key Enablers for 5 nm

Objective

The TAKE5 project is the next in a chain of thematically connected ENIAC JU KET pilot line projects which are associated with 450mm/300mm development for the 10nm technology node and the ECSEL JU project SeNaTe aiming at the 7nm technology node. The main objective of the TAKE5 project is the demonstration of 5nm patterning in line with the industry needs and the ITRS roadmap in the Advanced Patterning Center at the imec pilot line using innovative design and technology co-optimization, layout and device architecture exploration, and comprising demonstration of a lithographic platform for EUV technology, advanced process and holistic metrology platforms and new materials.
A lithography scanner will be developed based on EUV technology to achieve the 5nm module patterning specification. Metrology platforms need to be qualified for 5nm patterning of 1D, 2D and 3D geometries with the appropriate precision and accuracy. For the 5nm technology modules new materials will need to be introduced. Introduction of these new materials brings challenges for all involved deposition processes and the related equipment set. Next to new deposition processes also the interaction of the involved materials with subsequent etch steps will be studied. The project will be dedicated to find the best options for patterning.
The project relates to the ECSEL work program topic Process technologies – More Moore. It addresses and targets as set out in the MASP at the discovery of new Semiconductor Process, Equipment and Materials solutions for advanced CMOS processes that enable the nano-structuring of electronic devices with 5nm resolution in high-volume manufacturing and fast prototyping. The project touches the core of the continuation of Moore’s law which has celebrated its 50th anniversary and covers all aspects of 5nm patterning development.

Field of science

  • /natural sciences/physical sciences/electromagnetism and electronics/electrical conductivity/semiconductor
  • /natural sciences/mathematics/pure mathematics/geometry
  • /social sciences/law

Call for proposal

H2020-ECSEL-2015-2-IA-two-stage
See other projects for this call

Funding Scheme

ECSEL-IA - ECSEL Innovation Action

Coordinator

ASML NETHERLANDS B.V.
Address
De Run 6501
5504DR Veldhoven
Netherlands
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
EU contribution
€ 9 450 000

Participants (11)

APPLIED MATERIALS ISRAEL LTD
Israel
EU contribution
€ 2 081 250
Address
Oppenheimer Street 9
76705 Rehovot
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
ASM BELGIUM NV
Belgium
EU contribution
€ 58 300,88
Address
Kapeldreef 75
3001 Heverlee
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
COVENTOR SARL
France
EU contribution
€ 387 156
Address
Avenue Du Quebec 3
91140 Villebon Sur Yvette
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
FEI ELECTRON OPTICS BV
Netherlands
EU contribution
€ 559 050
Address
Achtseweg Noord Gebouw Aae 5
5651 GG Eindhoven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
Germany
EU contribution
€ 123 268,50
Address
Hansastrasse 27C
80686 Munchen
Activity type
Research Organisations
INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Belgium
EU contribution
€ 9 039 656,50
Address
Kapeldreef 75
3001 Leuven
Activity type
Research Organisations
BRUKER TECHNOLOGIES LTD
Israel
EU contribution
€ 662 250
Address
6 Hamechkar Street Ramat Gavriel Industrial Zone
2306990 Migdal Haemek
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
KLA-TENCOR CORPORATION (ISRAEL)
Israel
EU contribution
€ 901 379,40
Address
Hatikshoret St.
23100 Migdal Haemek
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
LAM RESEARCH BELGIUM

Participation ended

Belgium
EU contribution
€ 1 706,25
Address
Kapeldreef 75
3001 Leuven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
NOVA MEASURING INSTRUMENTS LTD
Israel
EU contribution
€ 1 500 000
Address
Weizmann Science Park Building 22
76100 Rehovot
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
CARL ZEISS SMT GMBH
Germany
EU contribution
€ 3 600 000
Address
Rudolf Eber Strasse 2
73447 Oberkochen
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)