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Technology Advances and Key Enablers for 5 nm

Objective

The TAKE5 project is the next in a chain of thematically connected ENIAC JU KET pilot line projects which are associated with 450mm/300mm development for the 10nm technology node and the ECSEL JU project SeNaTe aiming at the 7nm technology node. The main objective of the TAKE5 project is the demonstration of 5nm patterning in line with the industry needs and the ITRS roadmap in the Advanced Patterning Center at the imec pilot line using innovative design and technology co-optimization, layout and device architecture exploration, and comprising demonstration of a lithographic platform for EUV technology, advanced process and holistic metrology platforms and new materials.
A lithography scanner will be developed based on EUV technology to achieve the 5nm module patterning specification. Metrology platforms need to be qualified for 5nm patterning of 1D, 2D and 3D geometries with the appropriate precision and accuracy. For the 5nm technology modules new materials will need to be introduced. Introduction of these new materials brings challenges for all involved deposition processes and the related equipment set. Next to new deposition processes also the interaction of the involved materials with subsequent etch steps will be studied. The project will be dedicated to find the best options for patterning.
The project relates to the ECSEL work program topic Process technologies – More Moore. It addresses and targets as set out in the MASP at the discovery of new Semiconductor Process, Equipment and Materials solutions for advanced CMOS processes that enable the nano-structuring of electronic devices with 5nm resolution in high-volume manufacturing and fast prototyping. The project touches the core of the continuation of Moore’s law which has celebrated its 50th anniversary and covers all aspects of 5nm patterning development.

Call for proposal

H2020-ECSEL-2015-2-IA-two-stage-Master

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Sub call

H2020-ECSEL-2015-2-IA-two-stage

Coordinator

ASML NETHERLANDS B.V.
Net EU contribution
€ 9 450 000,00
Address
De Run 6501
5504DR Veldhoven
Netherlands

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Region
Noord-Brabant Zuidoost-Noord-Brabant
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 53 550 000,00

Participants (13)

APPLIED MATERIALS ISRAEL LTD
Israel
Net EU contribution
€ 2 081 250,00
Address
Oppenheimer Street 9
76705 Rehovot

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Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 11 793 750,00
ASM BELGIUM NV
Belgium
Net EU contribution
€ 58 300,88
Address
Kapeldreef 75
3001 Heverlee

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Region
Vlaams Gewest Prov. Vlaams-Brabant Arr. Leuven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 330 371,62
COVENTOR SARL
France
Net EU contribution
€ 387 156,00
Address
Avenue Du Quebec 3
91140 Villebon Sur Yvette

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SME

The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.

Yes
Region
Ile-de-France Ile-de-France Essonne
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 1 161 469,00
FEI ELECTRON OPTICS BV
Netherlands
Net EU contribution
€ 559 050,00
Address
Achtseweg Noord Gebouw Aae 5
5651 GG Eindhoven

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Region
Noord-Brabant Zuidoost-Noord-Brabant
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 3 167 950,00
FRAUNHOFER GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG EV
Germany
Net EU contribution
€ 123 268,50
Address
Hansastrasse 27c
80686 Munchen

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Region
Bayern Oberbayern München, Kreisfreie Stadt
Activity type
Research Organisations
Other funding
€ 184 902,75
INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Belgium
Net EU contribution
€ 9 039 656,50
Address
Kapeldreef 75
3001 Leuven

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Region
Vlaams Gewest Prov. Vlaams-Brabant Arr. Leuven
Activity type
Research Organisations
Other funding
€ 13 559 484,75
BRUKER TECHNOLOGIES LTD
Israel
Net EU contribution
€ 447 317,48
Address
6 Hamechkar Street Ramat Gavriel Industrial Zone
2306990 Migdal Haemek

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Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 2 534 799,08
Third-party

Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure.

Jordan Valley Semiconductors UK Ltd
United Kingdom
Net EU contribution
€ 173 532,52
Address
Belmont Business Park Belmont
DH1 1TW Durham

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SME

The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.

Yes
Region
North East (England) Tees Valley and Durham Durham CC
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 983 350,92
Third-party

Legal entity other than a subcontractor which is affiliated or legally linked to a participant. The entity carries out work under the conditions laid down in the Grant Agreement, supplies goods or provides services for the action, but did not sign the Grant Agreement. A third party abides by the rules applicable to its related participant under the Grant Agreement with regard to eligibility of costs and control of expenditure.

BRUKER AXS GMBH
Germany
Net EU contribution
€ 41 400,00
Address
Ostliche Rheinbruckenstrasse 49
76187 Karlsruhe

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Region
Baden-Württemberg Karlsruhe Karlsruhe, Stadtkreis
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 234 600,00
KLA-TENCOR CORPORATION (ISRAEL)
Israel
Net EU contribution
€ 901 379,40
Address
Hatikshoret St.
23100 Migdal Haemek

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Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 5 107 816,60
LAM RESEARCH BELGIUM

Participation ended

Belgium
Net EU contribution
€ 1 706,25
Address
Kapeldreef 75
3001 Leuven
Region
Vlaams Gewest Prov. Vlaams-Brabant Arr. Leuven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 9 668,75
NOVA LTD
Israel
Net EU contribution
€ 1 500 000,00
Address
5 David Fikes St
76100 Rehovot

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Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 8 500 000,00
CARL ZEISS SMT GMBH
Germany
Net EU contribution
€ 3 600 000,00
Address
Rudolf Eber Strasse 2
73447 Oberkochen

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Region
Baden-Württemberg Stuttgart Ostalbkreis
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 20 400 000,00