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300mm Pilot Line for Smart Power and Power Discretes

Objective

R3-POWERUP will push through the new generation of 300mm Pilot Line Facility for Smart Power technology in Europe. This will enable the European industry to set the world reference of innovative and competitive solutions for critical societal challenges, like Energy saving and CO2 Reduction (ref. to COP21 Agreement ), as well as Sustainable Environment through electric mobility and industrial power efficiency.

● Development and demonstration of a brand new 300mm advanced manufacturing facility addressing a multi-KET Pilot Line (i.e. Nanoelectronics, Nanotechnology, Advanced Manufacturing)
● Improvement in productivity and competitiveness of integrated IC solutions for smart power and power discrete technologies.

The strategy of the project is the following:
● The Pilot Line will enable the realization of sub-100nm Smart Power processes, starting from the 90nm BCD10 process, taking profit from the advanced and peculiar equipments available only for 300mm wafer size.
● The availability of a 300mm full processing line will also exploit the portability to 300mm of the most critical and expensive process steps devoted to power discrete devices.
● The Pilot Line will build on Digital Factory and Industry 4.0 principles, enforcing a flexible, adaptive and reliable facility, in order to investigate also the synergy and economic feasibility of supporting both Smart Power and power discrete processes in the same manufacturing line.
● The application of such technologies will be a breakthrough enabler for Energy Efficiency and CO2 Reduction worldwide, in line with COP21’s global action plan.

The Pilot Line is based on three main pillars:
1. Market driven continuous innovation on smart-power and power discrete;
2. Industrial policy focused on high quality and mass production’s cost optimization;
3. Set the ground for future wafer upgrade of “More than Moore” disruptive technologies (e.g. advanced MEMS manufacturing, now at 200mm)

Field of science

  • /social sciences/economics and business/economics/production economics/productivity

Call for proposal

H2020-ECSEL-2016-2-IA-two-stage
See other projects for this call

Funding Scheme

ECSEL-IA - ECSEL Innovation Action

Coordinator

STMICROELECTRONICS SRL
Address
Via C.olivetti 2
20864 Agrate Brianza
Italy
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
EU contribution
€ 23 244 092

Participants (34)

POLITECNICO DI TORINO
Italy
EU contribution
€ 122 500
Address
Corso Duca Degli Abruzzi 24
10129 Torino
Activity type
Higher or Secondary Education Establishments
CONSORZIO NAZIONALE INTERUNIVERSITARIO PER LA NANOELETTRONICA
Italy
EU contribution
€ 385 000
Address
Via Toffano 2
40125 Bologna
Activity type
Research Organisations
UNIVERSITA DI PISA
Italy
EU contribution
€ 122 500
Address
Lungarno Pacinotti 43/44
56126 Pisa
Activity type
Higher or Secondary Education Establishments
UNIVERSITA DEGLI STUDI DI PAVIA
Italy
EU contribution
€ 122 500
Address
Strada Nuova 65
27100 Pavia
Activity type
Higher or Secondary Education Establishments
CONSIGLIO NAZIONALE DELLE RICERCHE
Italy
EU contribution
€ 122 500
Address
Piazzale Aldo Moro 7
00185 Roma
Activity type
Research Organisations
ROBERT BOSCH GMBH
Germany
EU contribution
€ 594 086
Address
Robert-bosch-platz 1
70839 Gerlingen-schillerhoehe
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
KLA-Tencor MIE GmbH
Germany
EU contribution
€ 276 250
Address
Kubacher Weg 4
35781 Weilburg
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
ICOS VISION SYSTEMS NV
Belgium
EU contribution
€ 318 000
Address
Esperantolaan 8C
3001 Heverlee
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
ASM EUROPE BV
Netherlands
EU contribution
€ 52 950
Address
Versterkerstraat 8
1322 AP Almere
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
BESI AUSTRIA GMBH
Austria
EU contribution
€ 240 000
Address
Innstrasse 16
6240 Radfeld
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
DISCO HI-TEC EUROPE GMBH
Germany
EU contribution
€ 120 000
Address
Liebigstrasse 8
85551 Kirchheim
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
ADVANCED PACKAGING CENTER BV
Netherlands
EU contribution
€ 170 000
Address
Stenograaf 3
6921 EX Duiven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
SLOVENSKA TECHNICKA UNIVERZITA V BRATISLAVE
Slovakia
EU contribution
€ 98 000
Address
Vazovova 5
81243 Bratislava
Activity type
Higher or Secondary Education Establishments
NANO DESIGN SRO
Slovakia
EU contribution
€ 42 500
Address
Drotarskacesta 6385 19A
811 04 Bratislava
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
PICOSUN OY
Finland
EU contribution
€ 300 000
Address
Tietotie 3
02150 Espoo
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
SILTRONIC AG
Germany
EU contribution
€ 100 000
Address
Einsteinstrasse 172
81677 Munchen
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
INSTITUT MIKROELEKTRONICKYCH APLIKACI SRO
Czechia
EU contribution
€ 74 531,25
Address
Na Valentince 1003/1 Smichov
150 00 Praha 5
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
VYSOKE UCENI TECHNICKE V BRNE
Czechia
EU contribution
€ 105 000
Address
Antoninska 548/1
601 90 Brno Stred
Activity type
Higher or Secondary Education Establishments
SIEC BADAWCZA LUKASIEWICZ - INSTYTUT MIKROELEKTRONIKI I FOTONIKI
Poland
EU contribution
€ 139 650
Address
Aleja Lotnikow 32-46
02 668 Warszawa
Activity type
Research Organisations
TRITEM SPOLKA Z OGRANICZONA ODPOWIEDZIALNOSCIA
Poland
EU contribution
€ 50 000
Address
Ul. Ligocka 103
40 568 Katowice
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
UNIVERSITATEA POLITEHNICA DIN BUCURESTI
Romania
EU contribution
€ 0
Address
Splaiul Independentei 313 Sect 6
060042 Bucharest
Activity type
Higher or Secondary Education Establishments
GREEN POWER TECHNOLOGIES SL
Spain
EU contribution
€ 125 000
Address
Avenida Camas Pg Pibo 28
41110 Bollullos De La Mitacion Sevilla
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
UNIVERSIDAD DE SEVILLA
Spain
EU contribution
€ 106 163,75
Address
Calle S. Fernando 4
41004 Sevilla
Activity type
Higher or Secondary Education Establishments
APPLIED MATERIALS FRANCE
France
EU contribution
€ 23 911,25
Address
864 Chemin Des Fontaines
38190 Bernin
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
APPLIED MATERIALS ISRAEL LTD
Israel
EU contribution
€ 300 000
Address
Oppenheimer Street 9
76705 Rehovot
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
NOVA MEASURING INSTRUMENTS LTD
Israel
EU contribution
€ 100 000
Address
Weizmann Science Park Building 22
76100 Rehovot
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
SOITEC SA
France
EU contribution
€ 99 995,50
Address
Chemin Des Franques - Parc Technologique Des Fontaines
38190 Bernin
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
AP&S INTERNATIONAL GMBH
Germany
EU contribution
€ 93 750
Address
Obere Wiesen 9
78166 Donaueschingen
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
EV GROUP E. THALLNER GMBH
Austria
EU contribution
€ 92 802,50
Address
Di Erich Thallner Strasse 1
4782 St Florian Am Inn
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
ANCOSYS GMBH
Germany
EU contribution
€ 80 000
Address
Siemensstrasse 8
72124 Pliezhausen
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
LAM RESEARCH SAS
France
EU contribution
€ 70 000
Address
31 Chemin Du Vieux Chene
38240 Meylan
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
ATOTECH DEUTSCHLAND GMBH
Germany
EU contribution
€ 40 000
Address
Erasmusstrasse 20-24
10553 Berlin
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
LASER SYSTEMS & SOLUTIONS OF EUROPE
France
EU contribution
€ 59 733,25
Address
145 Rue Des Caboeufs
92230 Gennevilliers
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
APPLIED MATERIALS IRELAND LIMITED
Ireland
EU contribution
€ 54 791
Address
Block A Maynooth Business Campus
W23 Y7X0 Maynooth
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)