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300mm Pilot Line for Smart Power and Power Discretes

Objective

R3-POWERUP will push through the new generation of 300mm Pilot Line Facility for Smart Power technology in Europe. This will enable the European industry to set the world reference of innovative and competitive solutions for critical societal challenges, like Energy saving and CO2 Reduction (ref. to COP21 Agreement ), as well as Sustainable Environment through electric mobility and industrial power efficiency.

● Development and demonstration of a brand new 300mm advanced manufacturing facility addressing a multi-KET Pilot Line (i.e. Nanoelectronics, Nanotechnology, Advanced Manufacturing)
● Improvement in productivity and competitiveness of integrated IC solutions for smart power and power discrete technologies.

The strategy of the project is the following:
● The Pilot Line will enable the realization of sub-100nm Smart Power processes, starting from the 90nm BCD10 process, taking profit from the advanced and peculiar equipments available only for 300mm wafer size.
● The availability of a 300mm full processing line will also exploit the portability to 300mm of the most critical and expensive process steps devoted to power discrete devices.
● The Pilot Line will build on Digital Factory and Industry 4.0 principles, enforcing a flexible, adaptive and reliable facility, in order to investigate also the synergy and economic feasibility of supporting both Smart Power and power discrete processes in the same manufacturing line.
● The application of such technologies will be a breakthrough enabler for Energy Efficiency and CO2 Reduction worldwide, in line with COP21’s global action plan.

The Pilot Line is based on three main pillars:
1. Market driven continuous innovation on smart-power and power discrete;
2. Industrial policy focused on high quality and mass production’s cost optimization;
3. Set the ground for future wafer upgrade of “More than Moore” disruptive technologies (e.g. advanced MEMS manufacturing, now at 200mm)
Leaflet | Map data © OpenStreetMap contributors, Credit: EC-GISCO, © EuroGeographics for the administrative boundaries

Coordinator

STMICROELECTRONICS SRL

Address

Via C.Olivetti 2
20864 Agrate Brianza

Italy

Activity type

Private for-profit entities (excluding Higher or Secondary Education Establishments)

EU Contribution

€ 23 244 092

Participants (34)

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POLITECNICO DI TORINO

Italy

EU Contribution

€ 122 500

CONSORZIO NAZIONALE INTERUNIVERSITARIO PER LA NANOELETTRONICA

Italy

EU Contribution

€ 385 000

UNIVERSITA DI PISA

Italy

EU Contribution

€ 122 500

UNIVERSITA DEGLI STUDI DI PAVIA

Italy

EU Contribution

€ 122 500

CONSIGLIO NAZIONALE DELLE RICERCHE

Italy

EU Contribution

€ 122 500

ROBERT BOSCH GMBH

Germany

EU Contribution

€ 594 086

KLA-Tencor MIE GmbH

Germany

EU Contribution

€ 276 250

ICOS VISION SYSTEMS NV

Belgium

EU Contribution

€ 318 000

ASM EUROPE BV

Netherlands

EU Contribution

€ 52 950

BESI AUSTRIA GMBH

Austria

EU Contribution

€ 240 000

DISCO HI-TEC EUROPE GMBH

Germany

EU Contribution

€ 120 000

ADVANCED PACKAGING CENTER BV

Netherlands

EU Contribution

€ 170 000

SLOVENSKA TECHNICKA UNIVERZITA V BRATISLAVE

Slovakia

EU Contribution

€ 98 000

NANO DESIGN SRO

Slovakia

EU Contribution

€ 42 500

PICOSUN OY

Finland

EU Contribution

€ 300 000

SILTRONIC AG

Germany

EU Contribution

€ 100 000

INSTITUT MIKROELEKTRONICKYCH APLIKACI S.R.O.

Czechia

EU Contribution

€ 74 531,25

VYSOKE UCENI TECHNICKE V BRNE

Czechia

EU Contribution

€ 105 000

SIEC BADAWCZA LUKASIEWICZ - INSTYTUT TECHNOLOGII ELEKTRONOWEJ

Poland

EU Contribution

€ 139 650

TRITEM SPOLKA Z OGRANICZONA ODPOWIEDZIALNOSCIA

Poland

EU Contribution

€ 50 000

UNIVERSITATEA POLITEHNICA DIN BUCURESTI

Romania

GREEN POWER TECHNOLOGIES SL

Spain

EU Contribution

€ 125 000

UNIVERSIDAD DE SEVILLA

Spain

EU Contribution

€ 106 163,75

APPLIED MATERIALS FRANCE

France

EU Contribution

€ 23 911,25

APPLIED MATERIALS ISRAEL LTD

Israel

EU Contribution

€ 300 000

NOVA MEASURING INSTRUMENTS LTD

Israel

EU Contribution

€ 100 000

SOITEC SA

France

EU Contribution

€ 99 995,50

AP&S INTERNATIONAL GMBH

Germany

EU Contribution

€ 93 750

EV GROUP E. THALLNER GMBH

Austria

EU Contribution

€ 92 802,50

ANCOSYS GMBH

Germany

EU Contribution

€ 80 000

LAM RESEARCH SAS

France

EU Contribution

€ 70 000

ATOTECH DEUTSCHLAND GMBH

Germany

EU Contribution

€ 40 000

LASER SYSTEMS & SOLUTIONS OF EUROPE

France

EU Contribution

€ 59 733,25

APPLIED MATERIALS IRELAND LIMITED

Ireland

EU Contribution

€ 54 791

Project information

Grant agreement ID: 737417

Status

Ongoing project

  • Start date

    1 November 2017

  • End date

    30 April 2022

Funded under:

H2020-EU.2.1.1.7.

  • Overall budget:

    € 180 318 047,50

  • EU contribution

    € 28 046 206,50

Coordinated by:

STMICROELECTRONICS SRL

Italy