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Technology Advances and Key Enablers for Module Integration for 5 nm

Objective

In line with industry needs, Moore’s law, scaling in ITRS 2013/2015, and ECSEL JU MASP 2016, the main objective of the TAKEMI5 project is to discover, develop and demonstrate lithographic, metrology, process and integration technologies enabling module integration for the 5 nm node. This is planned with available EUV/NA0.33 scanners that are optimized for mix and match with existing DUV/NA1.35 scanners, and with system design and development of a new hyper NA EUV lithography tool to enable more single exposure patterning at 5 nm to create complex integrated circuits. Process steps for modules in Front-end, Middle and Back-end of line are discovered and developed using the most advanced tool capabilities and they are evaluated morphologically and electrically using a relaxed test vehicle. During the development, specific challenges in metrology are assessed and metrology tools are upgraded or newly developed. The results are demonstrated in the imec pilot line with qualified metrology tools at the 5 nm node. The TAKEMI5 project relates to the ECSEL work program topic Process technologies – More Moore. It addresses and targets, as set out in the MASP, at a (disruptive) new Semiconductor Process, Equipment and Materials solutions for advanced CMOS processes that enable the module integration of electronic devices for the 5nm node in high-volume manufacturing and fast prototyping. The project touches the core of the continuation of Moore’s law which has celebrated its 50th anniversary. The cost aware development process supports the involved companies, and places them in an enhanced position for their worldwide competition. Through their worldwide affiliations, the impact of the TAKEMI5 project will be felt outside Europe in America and Asia Pacific semiconductor centers and is expected to benefit the European economy a lot by supporting its semiconductor equipment and metrology sectors with innovations, exports and employment.

Coordinator

ASML NETHERLANDS B.V.
Net EU contribution
€ 7 013 260,76
Address
De Run 6501
5504DR Veldhoven
Netherlands

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Region
Noord-Brabant Zuidoost-Noord-Brabant
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 31 406 248,48

Participants (25)

ACTIVE TECHNOLOGIES SRL
Italy
Net EU contribution
€ 202 888,60
Address
Via Bela Bartok 29/b
44124 Ferrara

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SME

The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.

Yes
Region
Nord-Est Emilia-Romagna Ferrara
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 608 665,78
AIS AUTOMATION DRESDEN GmbH

Participation ended

Germany
Net EU contribution
€ 13 003,39
Address
Otto-mohr Strasse 6
01237 Dresden
Region
Sachsen Dresden Dresden, Kreisfreie Stadt
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 52 013,56
APPLIED MATERIALS BELGIUM
Belgium
Net EU contribution
€ 232 256,00
Address
Kapeldreef 75 Bus C1
3001 Leuven

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Region
Vlaams Gewest Prov. Vlaams-Brabant Arr. Leuven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 1 447 494,00
APPLIED MATERIALS ISRAEL LTD
Israel
Net EU contribution
€ 1 922 500,00
Address
Oppenheimer Street 9
76705 Rehovot

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Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 7 690 000,00
ASYS AUTOMATIC SYSTEMS GMBH & CO KG

Participation ended

Germany
Net EU contribution
€ 26 433,44
Address
Grafenbergweg 20
73614 Schorndorf
SME

The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.

Yes
Region
Baden-Württemberg Stuttgart Rems-Murr-Kreis
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 79 300,31
BRUKER TECHNOLOGIES LTD

Participation ended

Israel
Net EU contribution
€ 0,00
Address
6 Hamechkar Street Ramat Gavriel Industrial Zone
2306990 Migdal Haemek
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 0,00
COVENTOR SARL
France
Net EU contribution
€ 407 728,13
Address
Avenue Du Quebec 3
91140 Villebon Sur Yvette

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SME

The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.

Yes
Region
Ile-de-France Ile-de-France Essonne
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 1 223 184,37
CRYTUR SPOL SRO
Czechia
Net EU contribution
€ 70 000,00
Address
Na Lukach 2283
511 01 Turnov

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SME

The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.

Yes
Region
Severovýchod Liberecký kraj
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 210 000,00
EMC ISRAEL DEVELOPMENT CENTER LTD
Israel
Net EU contribution
€ 199 575,00
Address
Hamada 7
4673341 Herzliya

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Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 1 262 735,00
FEI ELECTRON OPTICS BV
Netherlands
Net EU contribution
€ 965 492,00
Address
Achtseweg Noord Gebouw Aae 5
5651 GG Eindhoven

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Region
Noord-Brabant Zuidoost-Noord-Brabant
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 3 909 508,00
FYZIKALNI USTAV AV CR V.V.I
Czechia
Net EU contribution
€ 48 562,50
Address
Na Slovance 1999/2
182 21 Praha 8

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Region
Praha Hlavní město Praha
Activity type
Higher or Secondary Education Establishments
Other funding
€ 90 187,50
ION BEAM SERVICES
France
Net EU contribution
€ 296 931,25
Address
Rue Gaston Imbert Prolongee
13790 Rousset

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SME

The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.

Yes
Region
Provence-Alpes-Côte d’Azur Provence-Alpes-Côte d’Azur Bouches-du-Rhône
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 890 793,75
ICOS VISION SYSTEMS NV
Belgium
Net EU contribution
€ 25 972,50
Address
Esperantolaan 8c
3001 Heverlee

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Region
Vlaams Gewest Prov. Vlaams-Brabant Arr. Leuven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 161 870,00
ICT Integrated Circuit Testing GmbH
Germany
Net EU contribution
€ 366 500,00
Address
Ammerthalstrasse 20
85551 Heimstetten

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Region
Bayern Oberbayern München, Landkreis
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 1 466 000,00
INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Belgium
Net EU contribution
€ 6 326 198,38
Address
Kapeldreef 75
3001 Leuven

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Region
Vlaams Gewest Prov. Vlaams-Brabant Arr. Leuven
Activity type
Research Organisations
Other funding
€ 11 748 654,12
INSTITUT FUER MIKROELEKTRONIK STUTTGART
Germany
Net EU contribution
€ 957 888,00
Address
Allmandring Strasse 30a
70569 Stuttgart

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Region
Baden-Württemberg Stuttgart Stuttgart, Stadtkreis
Activity type
Research Organisations
Other funding
€ 2 904 612,00
KLA-TENCOR CORPORATION (ISRAEL)
Israel
Net EU contribution
€ 901 217,25
Address
Hatikshoret St.
23100 Migdal Haemek

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Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 3 604 869,00
LAM RESEARCH BELGIUM
Belgium
Net EU contribution
€ 38 023,00
Address
Kapeldreef 75
3001 Leuven

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Region
Vlaams Gewest Prov. Vlaams-Brabant Arr. Leuven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 236 977,00
NANOMOTION LTD
Israel
Net EU contribution
€ 444 143,85
Address
Mordot Hacarmel Industrial Park 3 Hayetsira St
20692 Yokneam

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Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 1 776 575,40
NOVA LTD
Israel
Net EU contribution
€ 1 338 555,06
Address
5 David Fikes St
76100 Rehovot

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Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 8 165 194,94
PFEIFFER VACUUM
France
Net EU contribution
€ 224 956,00
Address
98 Avenue De Brogny
74000 Annecy

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Region
Auvergne-Rhône-Alpes Rhône-Alpes Haute-Savoie
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 903 169,00
RECIF TECHNOLOGIES
France
Net EU contribution
€ 95 400,94
Address
Rue Des Briquetiers 9
31700 Blagnac

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SME

The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.

Yes
Region
Occitanie Midi-Pyrénées Haute-Garonne
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 286 202,81
SEMILAB FELVEZETO FIZIKAI LABORATORIUM ZARTKORUEN MUKODO RESZVENYTARSASAG
Hungary
Net EU contribution
€ 213 401,00
Address
Prielle Kornelia Utca 4/a.
1117 Budapest

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Region
Közép-Magyarország Budapest Budapest
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 1 161 599,00
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST NATUURWETENSCHAPPELIJK ONDERZOEK TNO
Netherlands
Net EU contribution
€ 412 533,19
Address
Anna Van Buerenplein 1
2595 DA Den Haag

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Region
West-Nederland Zuid-Holland Agglomeratie ’s-Gravenhage
Activity type
Research Organisations
Other funding
€ 766 133,06
CARL ZEISS SMT GMBH
Germany
Net EU contribution
€ 5 596 579,00
Address
Rudolf Eber Strasse 2
73447 Oberkochen

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Region
Baden-Württemberg Stuttgart Ostalbkreis
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Other funding
€ 22 386 316,00