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Technology Advances and Key Enablers for Module Integration for 5 nm

Technology Advances and Key Enablers for Module Integration for 5 nm

Objective

In line with industry needs, Moore’s law, scaling in ITRS 2013/2015, and ECSEL JU MASP 2016, the main objective of the TAKEMI5 project is to discover, develop and demonstrate lithographic, metrology, process and integration technologies enabling module integration for the 5 nm node. This is planned with available EUV/NA0.33 scanners that are optimized for mix and match with existing DUV/NA1.35 scanners, and with system design and development of a new hyper NA EUV lithography tool to enable more single exposure patterning at 5 nm to create complex integrated circuits. Process steps for modules in Front-end, Middle and Back-end of line are discovered and developed using the most advanced tool capabilities and they are evaluated morphologically and electrically using a relaxed test vehicle. During the development, specific challenges in metrology are assessed and metrology tools are upgraded or newly developed. The results are demonstrated in the imec pilot line with qualified metrology tools at the 5 nm node. The TAKEMI5 project relates to the ECSEL work program topic Process technologies – More Moore. It addresses and targets, as set out in the MASP, at a (disruptive) new Semiconductor Process, Equipment and Materials solutions for advanced CMOS processes that enable the module integration of electronic devices for the 5nm node in high-volume manufacturing and fast prototyping. The project touches the core of the continuation of Moore’s law which has celebrated its 50th anniversary. The cost aware development process supports the involved companies, and places them in an enhanced position for their worldwide competition. Through their worldwide affiliations, the impact of the TAKEMI5 project will be felt outside Europe in America and Asia Pacific semiconductor centers and is expected to benefit the European economy a lot by supporting its semiconductor equipment and metrology sectors with innovations, exports and employment.
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Coordinator

ASML NETHERLANDS B.V.

Address

De Run 6501
5504dr Veldhoven

Netherlands

Activity type

Other

EU Contribution

€ 7 013 260,76

Participants (25)

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ACTIVE TECHNOLOGIES SRL

Italy

EU Contribution

€ 202 888,60

AIS AUTOMATION DRESDEN GmbH

Germany

EU Contribution

€ 13 003,39

APPLIED MATERIALS BELGIUM

Belgium

EU Contribution

€ 232 256

APPLIED MATERIALS ISRAEL LTD

Israel

EU Contribution

€ 1 922 500

ASYS AUTOMATIC SYSTEMS GMBH & CO KG

Germany

EU Contribution

€ 26 433,44

BRUKER JV ISRAEL LTD

Israel

COVENTOR SARL

France

EU Contribution

€ 407 728,13

CRYTUR SPOL.S.R.O.

Czechia

EU Contribution

€ 70 000

EMC ISRAEL DEVELOPMENT CENTER LTD

Israel

EU Contribution

€ 199 575

FEI ELECTRON OPTICS BV

Netherlands

EU Contribution

€ 965 492

FYZIKALNI USTAV AV CR V.V.I

Czechia

EU Contribution

€ 48 562,50

ION BEAM SERVICES

France

EU Contribution

€ 296 931,25

ICOS VISION SYSTEMS NV

Belgium

EU Contribution

€ 25 972,50

ICT Integrated Circuit Testing GmbH

Germany

EU Contribution

€ 366 500

INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM

Belgium

EU Contribution

€ 6 326 198,38

INSTITUT FUER MIKROELEKTRONIK STUTTGART

Germany

EU Contribution

€ 957 888

KLA-TENCOR CORPORATION (ISRAEL)

Israel

EU Contribution

€ 901 217,25

LAM RESEARCH BELGIUM

Belgium

EU Contribution

€ 38 023

NANOMOTION LTD

Israel

EU Contribution

€ 444 143,85

NOVA MEASURING INSTRUMENTS LTD

Israel

EU Contribution

€ 1 338 555,06

PFEIFFER VACUUM

France

EU Contribution

€ 224 956

RECIF TECHNOLOGIES

France

EU Contribution

€ 95 400,94

SEMILAB FELVEZETO FIZIKAI LABORATORIUM RESZVENYTARSASAG

Hungary

EU Contribution

€ 213 401

NEDERLANDSE ORGANISATIE VOOR TOEGEPAST NATUURWETENSCHAPPELIJK ONDERZOEK TNO

Netherlands

EU Contribution

€ 412 533,19

CARL ZEISS SMT GMBH

Germany

EU Contribution

€ 5 596 579

Project information

Grant agreement ID: 737479

Status

Ongoing project

  • Start date

    1 April 2017

  • End date

    30 September 2019

Funded under:

H2020-EU.2.1.1.7.

  • Overall budget:

    € 132 778 302,32

  • EU contribution

    € 28 339 999,24

Coordinated by:

ASML NETHERLANDS B.V.

Netherlands