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Technology Advances and Key Enablers for Module Integration for 5 nm

Objective

In line with industry needs, Moore’s law, scaling in ITRS 2013/2015, and ECSEL JU MASP 2016, the main objective of the TAKEMI5 project is to discover, develop and demonstrate lithographic, metrology, process and integration technologies enabling module integration for the 5 nm node. This is planned with available EUV/NA0.33 scanners that are optimized for mix and match with existing DUV/NA1.35 scanners, and with system design and development of a new hyper NA EUV lithography tool to enable more single exposure patterning at 5 nm to create complex integrated circuits. Process steps for modules in Front-end, Middle and Back-end of line are discovered and developed using the most advanced tool capabilities and they are evaluated morphologically and electrically using a relaxed test vehicle. During the development, specific challenges in metrology are assessed and metrology tools are upgraded or newly developed. The results are demonstrated in the imec pilot line with qualified metrology tools at the 5 nm node. The TAKEMI5 project relates to the ECSEL work program topic Process technologies – More Moore. It addresses and targets, as set out in the MASP, at a (disruptive) new Semiconductor Process, Equipment and Materials solutions for advanced CMOS processes that enable the module integration of electronic devices for the 5nm node in high-volume manufacturing and fast prototyping. The project touches the core of the continuation of Moore’s law which has celebrated its 50th anniversary. The cost aware development process supports the involved companies, and places them in an enhanced position for their worldwide competition. Through their worldwide affiliations, the impact of the TAKEMI5 project will be felt outside Europe in America and Asia Pacific semiconductor centers and is expected to benefit the European economy a lot by supporting its semiconductor equipment and metrology sectors with innovations, exports and employment.

Field of science

  • /natural sciences/physical sciences/electromagnetism and electronics/electrical conductivity/semiconductor
  • /social sciences/economics and business/business and management/employment
  • /social sciences/law

Call for proposal

H2020-ECSEL-2016-2-IA-two-stage
See other projects for this call

Funding Scheme

ECSEL-IA - ECSEL Innovation Action

Coordinator

ASML NETHERLANDS B.V.
Address
De Run 6501
5504DR Veldhoven
Netherlands
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
EU contribution
€ 7 013 260,76

Participants (25)

ACTIVE TECHNOLOGIES SRL
Italy
EU contribution
€ 202 888,60
Address
Via Bela Bartok 29/B
44124 Ferrara
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
AIS AUTOMATION DRESDEN GmbH

Participation ended

Germany
EU contribution
€ 13 003,39
Address
Otto-mohr Strasse 6
01237 Dresden
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
APPLIED MATERIALS BELGIUM
Belgium
EU contribution
€ 232 256
Address
Kapeldreef 75 Bus C1
3001 Leuven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
APPLIED MATERIALS ISRAEL LTD
Israel
EU contribution
€ 1 922 500
Address
Oppenheimer Street 9
76705 Rehovot
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
ASYS AUTOMATIC SYSTEMS GMBH & CO KG

Participation ended

Germany
EU contribution
€ 26 433,44
Address
Grafenbergweg 20
73614 Schorndorf
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
BRUKER TECHNOLOGIES LTD

Participation ended

Israel
EU contribution
€ 0
Address
6 Hamechkar Street Ramat Gavriel Industrial Zone
2306990 Migdal Haemek
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
COVENTOR SARL
France
EU contribution
€ 407 728,13
Address
Avenue Du Quebec 3
91140 Villebon Sur Yvette
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
CRYTUR SPOL.S.R.O.
Czechia
EU contribution
€ 70 000
Address
Palackeho 175
51101 Turnov
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
EMC ISRAEL DEVELOPMENT CENTER LTD
Israel
EU contribution
€ 199 575
Address
Hamada 7
4673341 Herzliya
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
FEI ELECTRON OPTICS BV
Netherlands
EU contribution
€ 965 492
Address
Achtseweg Noord Gebouw Aae 5
5651 GG Eindhoven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
FYZIKALNI USTAV AV CR V.V.I
Czechia
EU contribution
€ 48 562,50
Address
Na Slovance 2
18221 Praha 8
Activity type
Higher or Secondary Education Establishments
ION BEAM SERVICES
France
EU contribution
€ 296 931,25
Address
Rue Gaston Imbert Prolongee
13790 Rousset
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
ICOS VISION SYSTEMS NV
Belgium
EU contribution
€ 25 972,50
Address
Esperantolaan 8C
3001 Heverlee
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
ICT Integrated Circuit Testing GmbH
Germany
EU contribution
€ 366 500
Address
Ammerthalstrasse 20
85551 Heimstetten
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Belgium
EU contribution
€ 6 326 198,38
Address
Kapeldreef 75
3001 Leuven
Activity type
Research Organisations
INSTITUT FUER MIKROELEKTRONIK STUTTGART
Germany
EU contribution
€ 957 888
Address
Allmandring Strasse 30A
70569 Stuttgart
Activity type
Research Organisations
KLA-TENCOR CORPORATION (ISRAEL)
Israel
EU contribution
€ 901 217,25
Address
Hatikshoret St.
23100 Migdal Haemek
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
LAM RESEARCH BELGIUM
Belgium
EU contribution
€ 38 023
Address
Kapeldreef 75
3001 Leuven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
NANOMOTION LTD
Israel
EU contribution
€ 444 143,85
Address
Mordot Hacarmel Industrial Park 3 Hayetsira St
20692 Yokneam
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
NOVA MEASURING INSTRUMENTS LTD
Israel
EU contribution
€ 1 338 555,06
Address
Weizmann Science Park Building 22
76100 Rehovot
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
PFEIFFER VACUUM
France
EU contribution
€ 224 956
Address
98 Avenue De Brogny
74000 Annecy
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
RECIF TECHNOLOGIES
France
EU contribution
€ 95 400,94
Address
Rue Des Briquetiers 9
31700 Blagnac
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
SEMILAB FELVEZETO FIZIKAI LABORATORIUM RESZVENYTARSASAG
Hungary
EU contribution
€ 213 401
Address
Prielle Kornelia Utca 4/A.
1117 Budapest
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST NATUURWETENSCHAPPELIJK ONDERZOEK TNO
Netherlands
EU contribution
€ 412 533,19
Address
Anna Van Buerenplein 1
2595 DA Den Haag
Activity type
Research Organisations
CARL ZEISS SMT GMBH
Germany
EU contribution
€ 5 596 579
Address
Rudolf Eber Strasse 2
73447 Oberkochen
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)