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Implementing Manufacturing science solutions to increase equipment PrOductiVity and fab pErformance

Objective

IMPROVE aims to improve European Semiconductor fabs efficiency by providing methods and tools to better control the process variability, reduce the cycle time and enhance the effectiveness of the production equipment. This will be achieved thanks to 3 major developments.
The development of Virtual Metrology technics allowing to control the process at wafer level whilst suppressing standard metrology steps.
The development of Predictive Equipment Behaviour technics to improve the process tools reliability whilst optimizing the maintenance frequency and increasing the equipment uptime.
The development of Dynamic Risk Assessment and Dynamic Control Plan concepts, suppressing unnecessary measurements steps whilst dynamiccaly improving the control plan efficiency .
The impact of the integration of these technics in the line decision systems will also be evaluated and assessed.
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Call for proposal

JU-ENIAC-2008-1
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Coordinator

STMICROELECTRONICS CROLLES 2 SAS
Address
Rue Jean Monnet 850
38920 Crolles
France

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Private for-profit entities (excluding Higher or Secondary Education Establishments)
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EU contribution
€ 832 582

Participants (35)

STMICROELECTRONICS ROUSSET SAS
France
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€ 216 120
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Avenue Coq Zi Peynier Rousset
13790 Rousset

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STMICROELECTRONICS SRL
Italy
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€ 382 931
Address
Via C.olivetti 2
20864 Agrate Brianza

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Numonyx Italy Srl
Italy
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€ 430 359
Address
Via Camillo Olivetti 2
20864 Agrate Brianza

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INFINEON TECHNOLOGIES AG
Germany
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€ 206 314
Address
Am Campeon 1-15
85579 Neubiberg

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INFINEON TECHNOLOGIES AUSTRIA AG
Austria
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€ 166 501
Address
Siemensstrasse 2
9500 Villach

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INTEL RESEARCH AND INNOVATION IRELAND LIMITED
Ireland
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€ 107 234
Address
Collinstown Industrial Estate
. Leixlip Kildare

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Atmel
France
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€ 315 325
Address
Avenue Olivier Perroy
13790 Rousset

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AMS-OSRAM AG
Austria
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€ 338 455
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Tobelbaderstrasse 30 Schloss Premstatten
8141 Unterpremstatten

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PDF solutions
France
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€ 333 215
Address
Rue Pierre Flourens 95
34098 Montpellier

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CAMLINE GMBH
Germany
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€ 270 985
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Fraunhoferring 9
85238 Petershausen

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MASA GROUP SA
France
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€ 270 945
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Rue De La Michodiere 8
75002 Paris

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Straatum
Ireland
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€ 90 292
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Howth Junction Business Parkkilbarrack Unit 3
5 Dublin

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PROBAYES
France
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€ 71 907
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180 Avenue De L'europe
38330 Montbonnot Saint-martin

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Techno Fittings
Italy
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€ 218 770
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Via M. Tilli 53a6
00156 Rome

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FRAUNHOFER GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG EV
Germany
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€ 354 558
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Hansastrasse 27c
80686 Munchen

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COMMISSARIAT A L ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
France
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€ 315 258
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Rue Leblanc 25
75015 Paris 15

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LUDWIG-MAXIMILIANS-UNIVERSITAET MUENCHEN
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€ 23 965
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Geschwister Scholl Platz 1
80539 Muenchen

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Lexas Research
Ireland
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€ 60 830
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Invent Centre, Collins Avenue, Glasnevin 1
D9 Dublin

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UNIVERSITA DEGLI STUDI DI PAVIA
Italy
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€ 75 317
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Strada Nuova 65
27100 Pavia

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UNIVERSITA DEGLI STUDI DI MILANO
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€ 51 603
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Via Festa Del Perdono 7
20122 Milano

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UNIVERSITA DEGLI STUDI DI PADOVA
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€ 97 628
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Via 8 Febbraio 2
35122 Padova

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ECOLE NATIONALE SUPERIEURE DES MINES DE SAINT-ETIENNE
France
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€ 104 225
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Cours Fauriel 158
42023 Saint Etienne Cedex

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G-SCOP
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€ 79 026
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Avenue Félix Viallet 46
38000 Grenoble

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LAM
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€ 147 917
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Viale Colleoni 11
20041 Agrate Brianza

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CRITICAL SOFTWARE SA
Portugal
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€ 54 929
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Parque Industrial De Taveiro Lote 48
3045 504 Coimbra

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ItalianNational Council of Research, Torino/Padova
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€ 123 413
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Corso Duca Degli Abruzzi 24
10129 Torino

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CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE CNRS
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€ 65 860
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Rue Michel Ange 3
75794 Paris

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FACHHOCHSCHULE WIENER NEUSTADT GMBH
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€ 16 453
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Johannes Gutenbergstrasse 3
2700 Wiener Neustadt

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iSyst Intelligente SystemeGmbH
Germany
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Nordostpark 91
90411 Nürnberg

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InReCon AG
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€ 44 422
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Von-henle-ring 44
93161 Sinzing

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CNR-IMM
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€ 67 301
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Area Della Ricerca Napoli 1, Via Pietro Castellino 111
80131 Napoli

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AP-Technologies
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Hafenweg 18-20
48155 Munster

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DUBLIN CITY UNIVERSITY
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€ 65 289
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Glasnevin
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INFINEON TECHNOLOGIES DRESDEN GMBH& CO KG
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€ 107 906
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Konigsbrucker Strasse 180
01099 Dresden

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FRIEDRICH-ALEXANDER-UNIVERSITAET ERLANGEN-NUERNBERG
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€ 17 870
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Schlossplatz 4
91054 Erlangen

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