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Pilot line for micro-transfer-printing of functional components on wafer level

Objective

The “Pilot Line for Micro-Transfer-Printing of Functional Components on Wafer Level” project (MICROPRINCE) is focused on creation of a pilot line for heterogeneous integration of smart systems by micro-transfer-printing (µTP) in a semiconductor foundry manufacturing environment. Functional components like processed III/V devices, optical filters, and special sensors will be transfer printed to demonstrate the capabilities of the technology and pilot line. Based on several EU and national research activities demonstrating successfully the feasibility of µTP technology in a scientific and laboratory environment, the MICROPRINCE consortium has the goal to setup the first worldwide open access foundry pilot line for heterogeneous integration by µTP and to demonstrate its capability on five defined target application scenarios. For this purpose, the consortium consisting of 13 partners from four different countries combine their expertise along the value chain from materials and equipment, technology and semiconductor processing, integrated circuit and system design, test and application. The partners are industrial companies incl. SME’s, accompanied by leading research institutes with a clear focus on production and application in Europe. The working principle of the micro-transfer-printing technology is to use a micro-structured elastomer stamp to transfer microscale functional components from their native substrates onto non-native substrates. The lateral dimensions of the functional components can range from a few microns to a few hundreds of microns with thicknesses of only a few microns. The native substrate contains the functional components to be printed and is flexible in size and material. The MICROPRINCE pilot line is acting as a regional and nationwide competence cluster for a novel technology with European dimensions for heterogeneous system integration and supports the ECS industry to reach leadership in key applications.

Call for proposal

H2020-ECSEL-2016-2-IA-two-stage
See other projects for this call

Coordinator

X-FAB MEMS FOUNDRY GmbH
Address
Haarbergstr. 67
99097 Erfurt
Germany
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
EU contribution
€ 419 925

Participants (13)

X-FAB SEMICONDUCTOR FOUNDRIES GMBH
Germany
EU contribution
€ 211 900
Address
Haarbergstrasse 67
99097 Erfurt
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
MELEXIS TECHNOLOGIES
Belgium
EU contribution
€ 86 162,50
Address
Transportstraat 1
3980 Tessenderlo
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
MELEXIS TECHNOLOGIES SA
Switzerland
EU contribution
€ 0
Address
Chemin De Buchaux 38
2022 Bevaix
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
MELEXIS
Belgium
EU contribution
€ 38 787,50
Address
Rozendaalstraat 12
8900 Ieper
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
MELEXIS GMBH
Germany
EU contribution
€ 312 375
Address
Konrad-zuse-strasse 15
99099 Erfurt
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
X DISPLAY COMPANY TECHNOLOGY LIMITED

Participation ended

Ireland
EU contribution
€ 0
Address
6Th Floor, 2 Grand Canal Square
2 Dublin
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
HUAWEI TECHNOLOGIES RESEARCH & DEVELOPMENT BELGIUM

Participation ended

Belgium
EU contribution
€ 176 344,99
Address
Technologiepark-zwijnaarde 19 Aa Tower
9052 Gent
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
OPTICS BALZERS JENA GMBH
Germany
EU contribution
€ 97 599,69
Address
Otto-eppenstein-strasse 2
07745 Jena
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
Germany
EU contribution
€ 262 407,62
Address
Hansastrasse 27C
80686 Munchen
Activity type
Research Organisations
INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Belgium
EU contribution
€ 504 867,56
Address
Kapeldreef 75
3001 Leuven
Activity type
Research Organisations
UNIVERSITY COLLEGE CORK - NATIONAL UNIVERSITY OF IRELAND, CORK
Ireland
EU contribution
€ 173 125,40
Address
Western Road
T12 YN60 Cork
Activity type
Higher or Secondary Education Establishments
TECHNISCHE UNIVERSITAET DRESDEN
Germany
EU contribution
€ 263 946,81
Address
Helmholtzstrasse 10
01069 Dresden
Activity type
Higher or Secondary Education Establishments
X-CELEPRINT LIMITED
Ireland
EU contribution
€ 67 175,94
Address
6Th Floor 2 Grand Canal Square
D02 A342 Dublin
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)