Skip to main content

A Complimentary Inspection Technique based on Computer Tomography and Plenoptic Camera for MEMS Components

Objective

For the latest generation of micro-fabricated devices that are currently being developed, no suitable in-line production inspection equipment is available, simply because current inspection equipment expects planar processing while most of the devices are often highly 3D in nature e.g. medical. This lack of automated processing feedback makes it difficult to steer process development towards higher yields in micro-components and MEMS production. Another visible problem is the need to document and record process data, even on the individual device level, with the degree of traceability as is required for example, for medical devices fabricated under ISO13485. Both factors in the end limit the possibility of reliable and cost effective manufacturing of MEMS and micro-components.
Thus, CITCOM has been proposed to address the industrial needs of MEMS and micro-manufacturing which will offer an in-line production inspection and measurement system for micro-components. The system will be developed and demonstrated at TRL7. The system will be based on optical and X-ray techniques combined with computer tomography and advance robotic system capable of analyzing defects that occur in production of micro components e.g. stains, debris, fracture, abnormal displacements, chemical composition of surface coatings, surface traces etc. enabling 98% yield and 100% reliability.
Ultimately, CITCOM will cut such costs by 60% as it will offer a system with automated knowledge and inspection data based process feedback that will allow the detection and traceability of faults that may occur in MEMS production, especially for critical applications like aerospace, space and healthcare.
CITCOM will give Europe a technological and competitive advantage in the growing manufacturing and production industry. The consortium behind this action is strongly driven by industrial need and problem having Philips and Microsemi as end users and validators of the technology.

Call for proposal

H2020-FOF-2017
See other projects for this call

Funding Scheme

IA - Innovation action

Coordinator

CSEM CENTRE SUISSE D'ELECTRONIQUE ET DE MICROTECHNIQUE SA - RECHERCHE ET DEVELOPPEMENT
Address
Rue Jaquet Droz 1
2000 Neuchatel
Switzerland
Activity type
Research Organisations
EU contribution
€ 829 918,28

Participants (11)

PHILIPS ELECTRONICS NEDERLAND BV
Netherlands
EU contribution
€ 325 452,97
Address
High Tech Campus 52
5656 AG Eindhoven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
MICROCHIP TECHNOLOGY CALDICOT LIMITED
United Kingdom
EU contribution
€ 87 118,12
Address
Phase 2 Castlegate Business Park
NP26 5YW Gwent
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
RAYTRIX GMBH
Germany
EU contribution
€ 308 249,38
Address
Schauenburgerstrasse 116
24118 Kiel
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
TEKNOLOGIAN TUTKIMUSKESKUS VTT OY
Finland
EU contribution
€ 345 561,25
Address
Tekniikantie 21
02150 Espoo
Activity type
Research Organisations
TWI LIMITED
United Kingdom
EU contribution
€ 770 105
Address
Granta Park Great Abington
CB21 6AL Cambridge
Activity type
Research Organisations
EXCILLUM AB
Sweden
EU contribution
€ 475 359,68
Address
Jan Stenbecks Torg 17
164 40 Kista
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
AIXACCT SYSTEMS GMBH
Germany
EU contribution
€ 450 094,53
Address
Talbotsr 25
52068 Aachen
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
POLYTEC LIMITED
United Kingdom
EU contribution
€ 57 799,88
Address
Lambda House Lower Luton Road
AL5 5BZ Harpenden, Hertfordshire
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
ACONDICIONAMIENTO TARRASENSE ASSOCIACION
Spain
EU contribution
€ 238 562,50
Address
Carrer De La Innovacio 2
08225 Terrassa
Activity type
Research Organisations
INNOVATIVE TECHNOLOGY AND SCIENCE LIMITED - INNOTECUK
United Kingdom
EU contribution
€ 344 942,80
Address
Hildersham Road North Wing The Old Livery
CB21 6DR Cambridge
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
BRUNEL UNIVERSITY LONDON
United Kingdom
EU contribution
€ 529 871,25
Address
Kingston Lane
UB8 3PH Uxbridge
Activity type
Higher or Secondary Education Establishments