Skip to main content

Technology Advances for Pilotline of Enhanced Semiconductors for 3nm

Objective

"In line with industry needs, Moore’s law, scaling in ITRS 2013, and ECSEL JU MASP 2017, the main objective of the
TAPES3 project is to discover, develop and demonstrate lithographic, metrology, EUV mask technology, devices and process modules enabling 3nm node technology. This is planned with available EUV/NA 0.33 scanners, and with system design and integration of a new hyper NA EUV lithography tool to enable more single exposure patterning at 3nm to create complex integrated circuits. Process steps for 3D devices as alternative to the conventional FINFet will be explored for application in the 3nm node. The impact of the application of these so called 3D devices on circuit topology and logic design will be explored. During the development, specific challenges in metrology for the characterization of 3D devices will be assessed and metrology tools will be newly developed. The result will be demonstrated in the imec pilot line.
The TAPES3 project relates to the ECSEL work program topic Equipment, Material and Manufacturing. It addresses and targets, as set out in MASP, the grand Challange of ""More Moore Equipment and Materials for sub 10nm technologies"" by exploring the requirements and solutions for the 3nm node. The project touches the core of the continuation of Moore’s law. Moreover, the cost aware development process will support the involved companies, and will place them in a preferred position over their worldwide competition. Through their worldwide affiliations, the impact of the TAPES3 project will be felt outside Europe in America and Asia Pacific semiconductor centers and is expected to benefit the European economy a lot by supporting its semiconductor equipment and metrology sectors with innovations, exports and employment."

Field of science

  • /natural sciences/physical sciences/electromagnetism and electronics/electrical conductivity/semiconductor
  • /natural sciences/mathematics/pure mathematics/topology
  • /social sciences/economics and business/business and management/employment
  • /social sciences/law

Call for proposal

H2020-ECSEL-2017-1-IA-two-stage
See other projects for this call

Funding Scheme

ECSEL-IA - ECSEL Innovation Action

Coordinator

ASML NETHERLANDS B.V.
Address
De Run 6501
5504DR Veldhoven
Netherlands
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
EU contribution
€ 7 501 242,45

Participants (26)

APPLIED MATERIALS BELGIUM
Belgium
EU contribution
€ 190 167,78
Address
Kapeldreef 75 Bus C1
3001 Leuven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
APPLIED MATERIALS ISRAEL LTD
Israel
EU contribution
€ 1 462 650
Address
Oppenheimer Street 9
76705 Rehovot
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
ADVANCED MASK TECHNOLOGY CENTER GMBH & CO KG
Germany
EU contribution
€ 80 487,75
Address
Rahnitzer Allee 9
1109 Dresden
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
COVENTOR SARL
France
EU contribution
€ 358 802,50
Address
Avenue Du Quebec 3
91140 Villebon Sur Yvette
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
DEMCON ADVANCED MECHATRONICS ENSCHEDE B.V.
Netherlands
EU contribution
€ 344 999,98
Address
Institutenweg 25
7521 PH Enschede
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
FEI ELECTRON OPTICS BV
Netherlands
EU contribution
€ 820 654
Address
Achtseweg Noord Gebouw Aae 5
5651 GG Eindhoven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
Germany
EU contribution
€ 387 050,13
Address
Hansastrasse 27C
80686 Munchen
Activity type
Research Organisations
ION BEAM SERVICES
France
EU contribution
€ 274 096,20
Address
Rue Gaston Imbert Prolongee
13790 Rousset
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Belgium
EU contribution
€ 6 175 448,74
Address
Kapeldreef 75
3001 Leuven
Activity type
Research Organisations
INSTITUT FUER MIKROELEKTRONIK STUTTGART
Germany
EU contribution
€ 867 464,15
Address
Allmandring Strasse 30A
70569 Stuttgart
Activity type
Research Organisations
JSR MICRO NV
Belgium
EU contribution
€ 92 061
Address
Technologielaan 8
3001 Leuven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
KLA-TENCOR CORPORATION (ISRAEL)
Israel
EU contribution
€ 346 185
Address
Hatikshoret St.
23100 Migdal Haemek
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
LAM RESEARCH AG
Austria
EU contribution
€ 1 079 510
Address
Sez-strasse 1
9500 Villach
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
SIEMENS INDUSTRY SOFTWARE NV
Belgium
EU contribution
€ 183 675
Address
Interleuvenlaan 68
3001 Leuven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
NOVA MEASURING INSTRUMENTS LTD
Israel
EU contribution
€ 943 250
Address
Weizmann Science Park Building 22
76100 Rehovot
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITED
United Kingdom
EU contribution
€ 29 735,50
Address
Tubney Woods
OX13 5QX Abingdon
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
OPTIX FAB GMBH
Germany
EU contribution
€ 168 437,50
Address
Hans Knoll Str 6
07745 Jena
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
PAUL SCHERRER INSTITUT
Switzerland
EU contribution
€ 134 952,07
Address
Forschungstrasse 111
5232 Villigen Psi
Activity type
Research Organisations
PHYSIKALISCH-TECHNISCHE BUNDESANSTALT
Germany
EU contribution
€ 187 395,90
Address
Bundesallee 100
38116 Braunschweig
Activity type
Research Organisations
RECIF TECHNOLOGIES
France
EU contribution
€ 92 602,19
Address
Rue Des Briquetiers 9
31700 Blagnac
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
RHEINISCH-WESTFAELISCHE TECHNISCHE HOCHSCHULE AACHEN
Germany
EU contribution
€ 169 905,91
Address
Templergraben 55
52062 Aachen
Activity type
Higher or Secondary Education Establishments
SILTRONIC AG
Germany
EU contribution
€ 515 888,17
Address
Hanns Seidel Platz 4
81737 Munchen
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
SUSS MicroTec Photomask Equipment GmbH & Co. KG
Germany
EU contribution
€ 135 867,75
Address
Ferdinand-von-steinbeis-ring 10
75447 Sternenfels
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST NATUURWETENSCHAPPELIJK ONDERZOEK TNO
Netherlands
EU contribution
€ 761 974
Address
Anna Van Buerenplein 1
2595 DA Den Haag
Activity type
Research Organisations
VDL ETG TECHNOLOGY & DEVELOPMENT BV
Netherlands
EU contribution
€ 891 603
Address
Schakel 22
5651 GH Eindhoven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
CARL ZEISS SMT GMBH
Germany
EU contribution
€ 4 000 000
Address
Rudolf Eber Strasse 2
73447 Oberkochen
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)