CORDIS
EU research results

CORDIS

English EN
Metrology Advances for Digitized ECS industry 4.0

Metrology Advances for Digitized ECS industry 4.0

Objective

The metrology domain (which could be considered as the ‘eyes and ears’ for both R&D&I and production) is a key enabler for productivity enhancements in many industries across the electronic components and system (ECS) value chain and have to be an integral part of any Cyber Physical Systems (CPS) which consist of metrology equipment, virtual metrology or Industrial internet of things (IIoT) sensors, edge and high-performance computing (HPC). The requirements from the metrology is to support ALL process steps toward the final product. However, for any given ECS technology, there is a significant trade-off between the metrology sensitivity, precision and accuracy to its productivity. MADEin4 address this deficiency by focusing on two productivity boosters which are independent from the sensitivity, precision and accuracy requirements: • Productivity booster 1: High throughput, next generation metrology and inspection tools development for the nanoelectronics industry (all nodes down to 5nm). This booster will be developed by the metrology equipment’s manufacturers and demonstrated in an industry 4.0 pilot line at imec and address the ECS equipment, materials and manufacturing major challenges (MASP Chapter 15, major challenges 1 – 3). • Productivity booster 2: CPS development which combines Machine Learning (ML) of design (EDA) and metrology data for predictive diagnostics of the process and tools performances predictive diagnostics of the process and tools performances (predictive yield and tools performance). This booster will be developed and demonstrated in an industry 4.0 pilot line at imec, for the 5nm node, by the EDA, computing and metrology partners (MASP Chapter 15, major challenge 4). The same CPS concept will be demonstrated for the ‘digital industries’ two major challenges of the nanoelectronics (all nodes down to 5nm) and automotive end user’s partners (MASP Chapter 9, major challenges 1and 3).
Leaflet | Map data © OpenStreetMap contributors, Credit: EC-GISCO, © EuroGeographics for the administrative boundaries

Coordinator

APPLIED MATERIALS ISRAEL LTD

Address

Oppenheimer Street 9
76705 Rehovot

Israel

Activity type

Other

EU Contribution

€ 2 512 500

Participants (46)

Sort alphabetically

Sort by EU Contribution

Expand all

ARKEMA FRANCE SA

France

EU Contribution

€ 129 915,50

AVL DITEST GMBH

Germany

EU Contribution

€ 146 615

AVL LIST GMBH

Austria

EU Contribution

€ 320 522,50

BRILLIANETOR LTD

Israel

EU Contribution

€ 217 875

BRUKER JV ISRAEL LTD

Israel

EU Contribution

€ 245 000

CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE CNRS

France

EU Contribution

€ 280 000

COMAU SPA

Italy

EU Contribution

€ 300 000

COMMISSARIAT A L ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

France

EU Contribution

€ 1 694 459,38

CONSIGLIO NAZIONALE DELLE RICERCHE

Italy

EU Contribution

€ 349 912,50

ECP

France

EU Contribution

€ 84 933

EXCILLUM AB

Sweden

EU Contribution

€ 934 843

FEI ELECTRON OPTICS BV

Netherlands

EU Contribution

€ 1 710 500

FIAT CHRYSLER AUTOMOBILES ITALY SPA

Italy

EU Contribution

€ 1 053 250

FLEXIBLE OPTICAL BV

Netherlands

EU Contribution

€ 143 625

GLOBALFOUNDRIES Dresden Module One LLC & Co. KG

Germany

ICOS VISION SYSTEMS NV

Belgium

EU Contribution

€ 524 351

INSTITUT MINES-TELECOM

France

EU Contribution

€ 286 421,63

ICT Integrated Circuit Testing GmbH

Germany

EU Contribution

€ 1 060 000

INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM

Belgium

EU Contribution

€ 2 899 626,19

IPPON INNOVATION

France

EU Contribution

€ 42 768,75

KLA-TENCOR CORPORATION (ISRAEL)

Israel

EU Contribution

€ 1 587 500

Kompetenzzentrum - Das Virtuelle Fahrzeug, Forschungsgesellschaft mbH

Austria

EU Contribution

€ 118 868,75

MELLANOX TECHNOLOGIES LTD - MLNX

Israel

EU Contribution

€ 571 150

MENTOR GRAPHICS DEVELOPMENT CROLLES SARL

France

EU Contribution

€ 59 996

NANOMOTION LTD

Israel

EU Contribution

€ 476 121,75

NEARFIELD INSTRUMENTS B.V.

Netherlands

EU Contribution

€ 890 151,25

NEDERLANDSE ORGANISATIE VOOR TOEGEPAST NATUURWETENSCHAPPELIJK ONDERZOEK TNO

Netherlands

EU Contribution

€ 535 139,50

NOVA MEASURING INSTRUMENTS LTD

Israel

EU Contribution

€ 1 988 750

OCTO-TECHNOLOGY

France

EU Contribution

€ 111 575

PFEIFFER VACUUM

France

EU Contribution

€ 202 955,25

PHYSIKALISCH-TECHNISCHE BUNDESANSTALT

Germany

EU Contribution

€ 403 484,38

POLITECNICO DI TORINO

Italy

EU Contribution

€ 805 000

PRODRIVE TECHNOLOGIES BV

Netherlands

EU Contribution

€ 497 812,50

PVA TEPLA ANALYTICAL SYSTEMS GMBH

Germany

EU Contribution

€ 295 000

SEMI EUROPE GMBH

Germany

EU Contribution

€ 254 000

SEMILAB FELVEZETO FIZIKAI LABORATORIUM RESZVENYTARSASAG

Hungary

EU Contribution

€ 517 500

STMICROELECTRONICS CROLLES 2 SAS

France

EU Contribution

€ 461 408,71

STMICROELECTRONICS ROUSSET SAS

France

EU Contribution

€ 180 941,50

STMICROELECTRONICS SRL

Italy

EU Contribution

€ 1 841 000

TECHNISCHE UNIVERSITEIT DELFT

Netherlands

EU Contribution

€ 531 181,44

TECHNISCHE UNIVERSITEIT EINDHOVEN

Netherlands

EU Contribution

€ 526 742,13

THERMO FISHER SCIENTIFIC (BREMEN) GMBH

Germany

EU Contribution

€ 601 000

TOWER SEMICONDUCTOR LTD

Israel

EU Contribution

€ 600 000

UNIVERSITE D'AIX MARSEILLE

France

EU Contribution

€ 234 850

UNITY SEMICONDUCTOR

France

EU Contribution

€ 153 205,63

UNIVERSITATEA POLITEHNICA DIN BUCURESTI

Romania

Project information

Grant agreement ID: 826589

Status

Ongoing project

  • Start date

    1 April 2019

  • End date

    31 March 2022

Funded under:

H2020-EU.2.1.1.7.

  • Overall budget:

    € 127 491 472,96

  • EU contribution

    € 29 382 452,24

Coordinated by:

APPLIED MATERIALS ISRAEL LTD

Israel