CORDIS
EU research results

CORDIS

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Real time nano CHAracterization reLatEd techNloGiEeS

Project information

Grant agreement ID: 861857

Status

Ongoing project

  • Start date

    1 April 2020

  • End date

    31 March 2023

Funded under:

H2020-EU.2.1.3.

H2020-EU.2.1.2.

  • Overall budget:

    € 4 691 566,25

  • EU contribution

    € 4 691 566,25

Coordinated by:

UNIVERSITA DEGLI STUDI DI ROMA LA SAPIENZA

Italy

Objective

A cost-efficient production of reliable, innovative materials and devices like advanced electronics products (<65 nm strained channel transistors, CMOS image sensors) requires nanoscale real-time in-line control, nowadays not available, during manufacturing. State-of-the-art techniques capable to map physical observables at the nanoscale compatible with in-line operations, like Raman, InfraRed (IR), Photoluminescence (PL) spectroscopy, do not have typically enough resolution for the detailed characterization of nano-scaled devices. Signal amplification by localized plasmon resonance at a sharp tip can give the opportunity of improving both the spatial resolution and the signal/noise ratio. CHALLENGES main objective is to develop multipurpose nano-optical techniques and metrological protocols for real-time characterization, using plasmonic enhanced Raman, IR and PL signals, capable to enable an increase of speed, sensitivity, spectral range with full cleanroom compatibility within different production environments, to improve devices performance, quality and reliability. CHALLENGES will focus on development and demonstration of such technology on three relevant application contexts: Semiconductor Industry, Si Photovoltaics and 2D Materials. Overall, the envisaged results are expected to be applicable to many other industrial fields in which the materials control at the nanoscale is required, spanning from those others electronics-related (DRAM, non-volatile memory, MEMS) to those one materials science (additive manufacturing, nanocoatings) and life sciences (implants, softmatter apps) related. CHALLENGES is coordinated by a large silicon foundry company and it is strongly driven by industrial and applicative needs. The Consortium includes renowned EU research labs with top-class facilities and capacities, industry leading enterprises and innovative SMEs with a worldwide collaboration network that will boost the international dimension and impact of the project.
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Coordinator

UNIVERSITA DEGLI STUDI DI ROMA LA SAPIENZA

Address

Piazzale Aldo Moro 5
00185 Roma

Italy

Activity type

Higher or Secondary Education Establishments

EU Contribution

€ 382 562,50

Participants (13)

INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM

Belgium

EU Contribution

€ 406 966,25

GRAPHENEA SEMICONDUCTOR SL

Spain

EU Contribution

€ 275 000

LFOUNDRY SRL

Italy

EU Contribution

€ 793 717,50

CONSIGLIO NAZIONALE DELLE RICERCHE

Italy

EU Contribution

€ 319 375

TIBERLAB S.R.L.

Italy

EU Contribution

€ 175 050

COMMISSARIAT A L ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

France

EU Contribution

€ 337 793,75

NOVA MEASURING INSTRUMENTS LTD

Israel

EU Contribution

€ 206 937,50

NANONICS IMAGING LTD

Israel

EU Contribution

€ 364 687,50

SCANSENS GMBH

Germany

EU Contribution

€ 275 016,25

APPLIED MATERIALS ITALIA SRL

Italy

EU Contribution

€ 175 000

PHYSIKALISCH-TECHNISCHE BUNDESANSTALT

Germany

EU Contribution

€ 350 365

BEWARRANT

Belgium

EU Contribution

€ 290 500

SOL INSTRUMENTS LTD

Belarus

EU Contribution

€ 338 595

Project information

Grant agreement ID: 861857

Status

Ongoing project

  • Start date

    1 April 2020

  • End date

    31 March 2023

Funded under:

H2020-EU.2.1.3.

H2020-EU.2.1.2.

  • Overall budget:

    € 4 691 566,25

  • EU contribution

    € 4 691 566,25

Coordinated by:

UNIVERSITA DEGLI STUDI DI ROMA LA SAPIENZA

Italy