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IC Technology for the 2nm Node

Objective

The overall objective of the IT2 project is to explore, develop and demonstrate technology options that are needed to realize 2nm CMOS logic technology extending the scaled Semiconductor technology roadmap to the next node in accordance to Moore’s law. These activities cover creation of Lithography equipment, new Processes & Modules and Metrology tools capable to create and deal with new 2nm node 3D structures, defect analysis, overlay and features.
The topics addressed by the program relate to the ECSEL MASP 2019 Chapter 10; “Process Technology, Equipment, Materials and Manufacturing for electronic components and systems”, with emphasis on the following major challenge “the Extension of world leadership in Semiconductor Equipment, Materials and Manufacturing solutions” and “Developing Technology for heterogeneous System-on-Chip (SoC) Integration” of the ECSEL JU Annual Work Plan 2019.
The relation of the IT2 project to world leadership regards the extension of the scaled semiconductor technology roadmaps and thereby maintain competence in advanced More Moore technology in Europe to support leading edge manufacturing.
The relation of the IT2 project to the Developing Technology for heterogeneous System-on-chip Integration comes from activities regarding “System Scaling” in which technology is developed that enables wafer-to-wafer bonding creating 3D heterogeneous solutions with the aim to resolve performance limitations in power and data congestion.
In regard to the annual work plan 2019, the IT2 project support the ECSEL JU objectives by contribution to the development of a strong and competitive Electronic Components and Systems (ECS) by involving many of the equipment and tool developers like; ASML, Zeiss, Thermo Fisher, Applied Materials, Nova, KLA along the value chain and knowledge institutes such as ARCNL, imec, PTB, TNO and TU/e. And by stimulating a dynamic ecosystem through through the involvement of SMEs like IBS, Recif, Reden and Unity.

Field of science

  • /natural sciences/physical sciences/electromagnetism and electronics/electrical conductivity/semiconductor

Call for proposal

H2020-ECSEL-2019-1-IA
See other projects for this call

Funding Scheme

ECSEL-IA - ECSEL Innovation Action

Coordinator

ASML NETHERLANDS B.V.
Address
De Run 6501
5504DR Veldhoven
Netherlands
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
EU contribution
€ 3 000 000

Participants (31)

APPLIED MATERIALS BELGIUM
Belgium
EU contribution
€ 154 908,75
Address
Kapeldreef 75 Bus C1
3001 Leuven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
APPLIED MATERIALS ISRAEL LTD
Israel
EU contribution
€ 0
Address
Oppenheimer Street 9
76705 Rehovot
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
AMPHOS GMBH
Germany
EU contribution
€ 342 500
Address
Kaiserstrasse 100
52134 Herzogenrath
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
STICHTING NEDERLANDSE WETENSCHAPPELIJK ONDERZOEK INSTITUTEN
Netherlands
EU contribution
€ 212 187,50
Address
Winthontlaan 2
3526 KV Utrecht
Activity type
Research Organisations
BRUKER TECHNOLOGIES LTD
Israel
EU contribution
€ 288 875
Address
6 Hamechkar Street Ramat Gavriel Industrial Zone
2306990 Migdal Haemek
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
CADENCE DESIGN SYSTEMS SAS
France
EU contribution
€ 250 000
Address
18 Rue Grange Dame Rose 18
78140 Velizy-villacoublay
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
CAMECA
France
EU contribution
€ 212 500
Address
Quai De Gresillons 29
92622 Gennevilliers
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
COVENTOR SARL
France
EU contribution
€ 288 500
Address
Avenue Du Quebec 3
91140 Villebon Sur Yvette
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
EV GROUP E. THALLNER GMBH
Austria
EU contribution
€ 354 330
Address
Di Erich Thallner Strasse 1
4782 St Florian Am Inn
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
ION BEAM SERVICES
France
EU contribution
€ 282 525
Address
Rue Gaston Imbert Prolongee
13790 Rousset
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Belgium
EU contribution
€ 5 511 240,44
Address
Kapeldreef 75
3001 Leuven
Activity type
Research Organisations
LEIBNIZ-INSTITUT FUR OBERFLACHENMODIFIZIERUNG
Germany
EU contribution
€ 346 696,88
Address
Permoserstrasse 15
04318 Leipzig
Activity type
Research Organisations
KLA-TENCOR CORPORATION (ISRAEL)
Israel
EU contribution
€ 1 030 305
Address
Hatikshoret St.
23100 Migdal Haemek
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
LASER SYSTEMS & SOLUTIONS OF EUROPE
France
EU contribution
€ 134 900,29
Address
14-38 Rue Alexandre
92230 Gennevilliers
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
NOVA MEASURING INSTRUMENTS LTD
Israel
EU contribution
€ 806 000
Address
Weizmann Science Park Building 22
76100 Rehovot
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
PFEIFFER VACUUM
France
EU contribution
€ 184 303,50
Address
98 Avenue De Brogny
74000 Annecy
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
PRODRIVE TECHNOLOGIES BV
Netherlands
EU contribution
€ 263 035
Address
Science Park Eindhoven 5501
5692 EM Son
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
PHYSIKALISCH-TECHNISCHE BUNDESANSTALT
Germany
EU contribution
€ 303 936
Address
Bundesallee 100
38116 Braunschweig
Activity type
Research Organisations
RECIF TECHNOLOGIES
France
EU contribution
€ 246 660
Address
Rue Des Briquetiers 9
31700 Blagnac
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
REDEN B.V.
Netherlands
EU contribution
€ 81 637,63
Address
F Hazemeijerstraat 800
7555 RJ Hengelo Ov
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
SEMILAB FELVEZETO FIZIKAI LABORATORIUM RESZVENYTARSASAG
Hungary
EU contribution
€ 416 250
Address
Prielle Kornelia Utca 4/A.
1117 Budapest
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
SOITEC SA
France
EU contribution
€ 677 477
Address
Chemin Des Franques - Parc Technologique Des Fontaines
38190 Bernin
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
SPTS TECHNOLOGIES LIMITED
United Kingdom
EU contribution
€ 48 525,75
Address
Ringland Way
NP18 2TA Newport
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
FEI ELECTRON OPTICS BV
Netherlands
EU contribution
€ 803 000
Address
Achtseweg Noord Gebouw Aae 5
5651 GG Eindhoven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST NATUURWETENSCHAPPELIJK ONDERZOEK TNO
Netherlands
EU contribution
€ 458 878,88
Address
Anna Van Buerenplein 1
2595 DA Den Haag
Activity type
Research Organisations
TECHNISCHE UNIVERSITEIT EINDHOVEN
Netherlands
EU contribution
€ 602 776,56
Address
Groene Loper 3
5612 AE Eindhoven
Activity type
Higher or Secondary Education Establishments
UNITY SEMICONDUCTOR
France
EU contribution
€ 216 526,56
Address
611 Rue Aristide Berges
38330 Montbonnot-saint-martin
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
UNIVERSITATEA POLITEHNICA DIN BUCURESTI
Romania
EU contribution
€ 0
Address
Splaiul Independentei 313 Sect 6
060042 Bucharest
Activity type
Higher or Secondary Education Establishments
VDL ETG TECHNOLOGY & DEVELOPMENT BV
Netherlands
EU contribution
€ 206 288,65
Address
Schakel 22
5651 GH Eindhoven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
CARL ZEISS SMT GMBH
Germany
EU contribution
€ 2 695 397,60
Address
Rudolf Eber Strasse 2
73447 Oberkochen
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
ASML BELGIUM BVBA
Belgium
EU contribution
€ 411 225
Address
Kalmthoutsesteenweg 100
2919 Essen
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)