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Microfabrication capability and expertise for user-defined purposes

Ziel



In recent years the LIGA-technique evolved as a basic fabrication process for the production of a large variety of microstructures utilising metals, polymers, ceramics, and even glasses. This technology will, because of its cost-effectiveness and versatility, also in combination with other microfabrication techniques like silicon micro-machining, thin film technology, semiconductor processing, excimer laser micromachining, and polymer stamping, lead to a miniaturization in many fieds. Microsystem approaches now become more and more attractive in domains like sensor and actuator technology, fluid dynamics, minimal invasive surgery, electrical and optical connectors, optical engineering (integrated optics, nonlinear optics), biomedical engineering, and environmental technology. The miniaturization in all these fields will cause a revolution in technology as well as in everyday life, larger than the consequences of the previous miniaturization in the electronics domain. Therefore, it is of great importance that Europe will be at the leading edge of this development. Thus, the Institut für Mikrotechnik (IMM) wants to establish easy access to all relevant methods of microfabrication and microsystem technology for all research groups in Europe who want to complete their own repertoire of microtechnology for the design and construction of new microsystems or who want to bring microtechnical approaches to new fields, in which they are experienced. To fulfill this task, IMM disposes of expertise and equipment for the whole spectrum of microtechnical methods mentioned above as well as of high performance analytical equipment and design and simulation capabilities for microcomponents and microsystems. So, the best approach can be chosen and then used to solve the users' problems in practice. The guest researchers will be strongly involved in all the consecutive realization steps including choice of methodology, design, simulation and different fabrication phases as well as characterization and testing, always assisted by IMM's experts. Thus, they will receive a unique, realistic and thorough training on the applied methods that can be the basis to introduce them also in their home institutes. Thus, the proposed project will help to set up the "critical density" of microtechnology experts in Europe to withstand the future pressure on the European market originating from US and japanese activities.

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INSTITUT FUER MIKROTECHNIK MAINZ GMBH
EU-Beitrag
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Adresse
CARL-ZEISS-STRASSE 18-20
55129 MAINZ
Deutschland

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