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Zawartość zarchiwizowana w dniu 2022-12-23

The Creation of a Software Tool for the Resist Heating Effect Correction in Electron Beam Lithography on the Base of Experimental Investigation and Verification

Cel

The objective of the project is to develop an advanced CAD tool for the correction of resist heating effects in electron beam lithography (EBL). This will allow designers to simulate and compensate for distortions due to the resist heating effects and thus enable the fabrication of microelectronics structures without distortions. The software tool will be designed for industrial application in the most advanced process of sub-micron microelectronics technology - variable shaped EBL.

The heating effect correction program will be integrated into the commercially available post-processor SiCat and the proximity correction tool PROXECCO enabling correction of both proximity and heating effects.

A physical model of the resist heating effect will be built for this purpose. The correctness of model and software will be proven by experimental verification.

Temat(-y)

Data not available

Zaproszenie do składania wniosków

Data not available

System finansowania

CSC - Cost-sharing contracts

Koordynator

AISS GmbH
Wkład UE
Brak danych
Adres
Gotzinger Straße 46
81371 München
Niemcy

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Koszt całkowity
Brak danych

Uczestnicy (2)