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Transfer standards for calibration of scanning probe microscopes

Objective



Summary There are now 200 scanning probe microscopes (SPM) installed in Europe and the number is rapidly increasing. This new class of universal 3 coordinate measurement machines, which give direct images of the topography of surfaces in the range 0.1 nm - 100 uM, has many industrial and scientific applications. One very important industrial application is the measurement of micro roughness and micro hardness of surfaces which becomes increasingly important in the motor and tool manufacturing industry but also for advanced integrated circuit manufacturing. However, to be valuable as a measurement instrument the SPM needs to be properly calibrated, a task which is not possible now, if proper traceability to the metre definition is required.
The purpose of the project is to produce and certify several sets of transfer standards, which can be used to calibrate the three orthogonal axes x, y) and of scanning probe microscopes (x, y are the two horizontal axes, is the vertical axis). The transfer standards shall have a regular three-dimensional pattern on the surface with known characteristic spacing (called pitch) in the x and y directions and a known step height in the z direction. The pitches and step heights shall cover the range from 3 nm to 30 uM and shall be measured with traceability to the metre definition. With this set of transfer standards any SPM can be calibrated under all measurement conditions. The selected set of artefacts will be calibrated using well accepted techniques. The local variations of pitch and step height over the surface of the transfer standard (the variations should be kept as small as possible) will be determined. The calibration package will include an algorithm for the calculation of the calibration parameters, including the associated uncertainty. In the design of the package, ease of use will be emphasised, making the package useful to industrial SPM users in particular. Measurement standards will be produced by using the cross-section of structures of alternating layers grown by molecular beam epitaxy, electron beam lithography, holography and advanced integrated circuit manufacturing technology. A flat standard will be manufactured from a single crystal of mica, a natural mineral.
The calibration will be done with documented traceability by a combination of optical and interference microscopy, profilometry, SPM, light diffraction and x-ray diffraction.
After the project the standards will be sold by the commission as a reference material.
If approved by the Commission, the partners will also be ready to sell the calibration packages.

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Call for proposal

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Coordinator

DANISH INSTITUTE OF FUNDAMENTAL METROLOGY
EU contribution
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Address
1,Matematiktorvet 307
2800 LYNGBY
Denmark

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Participants (4)