Community Research and Development Information Service - CORDIS

Excimer laser lithography project for sub quarter micron era

From 1996-02-01 to 1997-07-31

Project details

Total cost:

EUR 7 600 000

EU contribution:

EUR 3 800 000

Coordinated in:

France

Funding scheme:

CSC - Cost-sharing contracts

Objective

Related information

Coordinator

Grenoble Submicron Silicon
France
Avenue Des Martyrs 17
38054 Grenoble 9
France
See on map
Administrative contact: Jean-Marc TEMERSON
Tel.: +33-476764240
Fax: +33-476903443

Participants

Asm Lithography B.V.
Netherlands
De Run, 110
5503 LA Veldhoven
Netherlands
See on map
Administrative contact: Stefan WITTEKOEK
Tel.: +31-402303310
Fax: +31-402303655
CCLRC Rutherford Appleton Laboratory (RAL)
United Kingdom
Chilton
OX11 0QX Didcot
United Kingdom
Administrative contact: Francis GOODALL
Fax: +44-236445391
Carl Zeiss
Germany
Carl Zeiss-Str. 4-54 4-54
73446 Oberkochen
Germany
See on map
Administrative contact: OSWALD
Tel.: +49-7364203141
Fax: +49-73646808
Exitech Ltd
United Kingdom
Hanborough Park
OX7 2LH Long Hanborough
United Kingdom
Administrative contact: Malcolm GOWER
Tel.: +44-1993-883324
Fax: +44-1993-883334
E-mail
HERAEUS QUARZSCHMELZE
Germany
QUARZSTRAßE 8
63450 HANAU
Germany
See on map
Administrative contact: Stephen THOMAS
Tel.: +49-06181367435
Fax: +49-0618139420
Interuniversity Microelectronics Centre
Belgium
Kapeldreef 75
3001 Leuven
Belgium
See on map
Administrative contact: Luc VAN DEN HOVE
Tel.: +32-16-281323
Fax: +32-16-281214
Korth Kristalle Gmbh
Germany
Am Jaegersberg 3
24161 Altenholz
Germany
See on map
Administrative contact: Gunther WEHRHAN
Tel.: +49-431362051
Fax: +49-43136626
Lambda Physic Gesellschaft Zur Herstellung Von Lasern Mbh
Germany
Hans-Boeckler-Strasse 12
37079 Goettingen
Germany
See on map
Administrative contact: Uwe STAMM
Tel.: +49-5516-938201
Fax: +49-5516-8691
E-mail
Follow us on: RSS Facebook Twitter YouTube Managed by the EU Publications Office Top