Community Research and Development Information Service - CORDIS

Single wafer highly n+ and p+ doped amorphous and poly silicon deposition

From 1995-12-01 to 1997-02-28

Project details

Total cost:

EUR 2 920 000

EU contribution:

EUR 1 460 000

Coordinated in:

France

Funding scheme:

ACM - Preparatory, accompanying and support measures

Objective

Coordinator

Grenoble Submicron Silicon
France
Avenue Des Martyrs 17
38054 Grenoble 9
France
See on map
Administrative contact: Jean-Paul KLEIN
Tel.: +33-476764109
Fax: +33-476903443
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