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Sigma 204 force fill assessment for 0.5 microns contact/via al(0.5 %cu) plug technology in high volume production environment

Ziel

- To evaluate performance and cost benefits of the new metalisation technology over the tungsten plug/ aluminium process.

- To evaluate the sputter etch - Ti/TiN processes which precede the aluminium deposition and the FORCEFILL process.

- To assess and improve the overall equipment performance in a high volume 0.5 micron BICMOS production line

The performance of the Electrotech SIGMA 204 FORCEFILL cluster tool is to be assessed for 0.5 micron contact/via plug technology (Al/0.5%Cu) in the high volume production environment of Texas Instruments, Freising Germany. The advantages of this aluminium FORCEFILL technology over the presently employed tungsten plug and aluminium process has to be demonstrated under manufacturing conditions. The complete metalisation process sequence is: Sputter etch - Ti/TiN - Al/0.5%Cu - FORCEFILL.

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Koordinator

Texas Instruments Deutschland Gmbh
EU-Beitrag
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Adresse
Haggertystrasse 1
85356 Freising
Deutschland

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