Community Research and Development Information Service - CORDIS

Hot cluster for integrated vapour phases cleaning and processing of dielectrics and insitu doped polysilicon

From 1996-06-01 to 1998-09-30

Project details

Total cost:

EUR 5 600 000

EU contribution:

EUR 2 800 000

Coordinated in:

Germany

Funding scheme:

ACM - Preparatory, accompanying and support measures

Objective

Coordinator

Siemens Ag, Semiconductor Group
Germany
Balanstrasse 73
81541 Muenchen
Germany
See on map
Administrative contact: Alexander GSCHWANDTNER
Tel.: +49-89-63645067
Fax: +49-89-63644236
Follow us on: RSS Facebook Twitter YouTube Managed by the EU Publications Office Top