Total environment fab waste gas management via networked and monitored escape disposal systems

Projektinformationen

ESCAPE-NET

ID Finanzhilfevereinbarung: FP4_20580

Startdatum 8 Dezember 1995

Enddatum 7 April 1997

Finanziert unter

• Specific research and technological development programme in the field of information technologies, 1994-1998

Gesamtkosten € 1 260 000,00

EU-Beitrag € 630 000,00

Koordiniert durch

Zentrum Mikroelektronik Dresden
Germany

Ziel

- To evaluate the emission of waste-gas of Al, TiN/Al, and SiO dry etching processes using CF4, CHF3, C2F6, BCl3, Cl2, SiCl4.

- To evaluate waste-gas emission of SiO, PSG and SiN CVD using SiH, PH3 ,TEOS, DCS, NH3

- To assess and minimise the cost of ownership of above mentioned disposal processes based on network data collection by ESCAPE-NET.

The performance of a monitored network of DAS ESCAPE waste gas abatement systems will be assessed in the production line of the IC manufacturer ZMD.
Four critical disposal processes have been selected to demonstrate the technical performance of the networked ESCAPE system under production conditions, together with the cost advantage of monitored networks of abatement systems over the same number of independently used ones.

Wissenschaftliches Gebiet

• natural sciences › chemical sciences › inorganic chemistry › post-transition metals

Programm/Programme

• FP4-ESPRIT 4 - Specific research and technological development programme in the field of information technologies, 1994-1998

Thema/Themen

• 2.9 - Building blocks, methods & tools for semiconductor app&techs

Aufforderung zur Vorschlagseinreichung

Data not available

Finanzierungsplan

EST - Marie Curie actions-Early-stage Training

Koordinator

Zentrum Mikroelektronik Dresden

• EU-Beitrag: Keine Daten
• Adresse: Grenzstrasse 28 ; 01109 Dresden ; Deutschland
• Gesamtkosten: Keine Daten