Community Research and Development Information Service - CORDIS

Total environment fab waste gas management via networked and monitored escape disposal systems

From 1995-12-08 to 1997-04-07

Project details

Total cost:

EUR 1 260 000

EU contribution:

EUR 630 000

Coordinated in:

Germany

Funding scheme:

EST - Marie Curie actions-Early-stage Training

Objective

Coordinator

Zentrum Mikroelektronik Dresden
Germany
Grenzstrasse 28
01109 Dresden
Germany
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Administrative contact: Guenther VON RUTHENDORF
Tel.: +49-351-8822287
Fax: +49-351-8822276
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