Objectif - To reduce test time in electromigration tests targeting low current 0.1 mA/cm{2}, more appropriate to real life, and to perform very accurate measurement of resistance degradation at a very accurately held temperature (sigma = 0.0085 °C) to obtain credible results in about 10 days, and low costs per DuT (Device under Test).- To establish a new standard for electromigration testing with reduced test time using in-situ degradation monitoring, opening up a whole new family of reliability systems using the same principles.The assessment of the DESTIN electromigration test system will be carried out by three semiconductor manufacturers. Normally high currents have been used to speed up electromigration test results but correlation with real-time results is poor. Here the approach is very accurate measurement of degradation resistance changed at low stress currents to give better correlation with real-time. Champ scientifique natural sciencesphysical scienceselectromagnetism and electronicssemiconductivity Programme(s) FP4-ESPRIT 4 - Specific research and technological development programme in the field of information technologies, 1994-1998 Thème(s) 2.9 - Building blocks, methods & tools for semiconductor app&techs Appel à propositions Data not available Régime de financement ACM - Preparatory, accompanying and support measures Coordinateur Alcatel Microelectronics N.V. Contribution de l’UE Aucune donnée Adresse Westerring 15 9700 Oudenaarde Belgique Voir sur la carte Coût total Aucune donnée
