Community Research and Development Information Service - CORDIS

Extreme ultra-violet (EUV) lithography using a laser plasma source and multilayer optics

From 1995-04-01 to 1997-03-31

Project details

Total cost:

Not available

EU contribution:

EUR 50 000

Coordinated in:

Netherlands

Objective

Related information

Coordinator

Stichting voor Fundamenteel Onderzoek der Materie
Netherlands
Edisonbaan 14
3439 MN Nieuwegein
Netherlands
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Administrative contact: BIJKERK
Tel.: +31-30-6096999
Fax: +31-30-6031204

Participants

European Synchrotron Radiation Facility
France
38043 Grenoble
France
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Administrative contact: BRANDEN
KING'S COLLEGE LONDON
United Kingdom
Strand
LONDON
United Kingdom
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Administrative contact: MICHETTE
Russian Academy of Sciences
Russia
117924 Moscow
Russia
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Administrative contact: SOBEL'MAN
Russian Academy of Sciences
Russia
194021 St. Petersburg
Russia
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Administrative contact: GORDEEV
Russian Academy of Sciences
Russia
142432 Chernogolovka, Moscow Region
Russia
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Administrative contact: ERKO
Russian Academy of Sciences
Russia
603600 Nizhny Novgorod
Russia
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Administrative contact: GAPONOV
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