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Nano-fabrication of dfb lasers and saw devices by off-axis holographic lithography

Objective



Distributed feedback (DFB) lasers and surface acoustic wave (SAW) devices are key components in optical fibre and wireless telecommunication systems. The former allow very accurate definition of the fibre optic system wavelength, and thus by combining a number of DFB lasers with slightly different wavelengths into a simple device (wavelength division multiplexing (WDM) a very high data bit rate can be obtained. SAW devices are low-loss, high-selectivity filters, which enable a high density of communication frequencies for, for example, mobile telephone application. The critical elements in both DFB lasers and SAW devices are high-frequency, uni-directional gratings whose structure and method of fabrication strongly determine the performance and cost of the communication system involved. In the case of WDM DFB lasers whose emission wavelength is 1.5 m, which require a grating line width of ~125 nm, a tremendous cost saving can be gained by monolithically fabricating the different wavelength lasers on the same chip.

For SAW devices, improved performance from the next-generation devices for the 2.45 GHz frequency band and the realisation of the next-but-one generation devices for the 5.8GHz b and require grating line widths of~150 nm. The conventional lithographic methods currently employed for manufacturing DFB lasers and SAW filters are not suitable for these next-generation devices. In this project, an alternative lithographic technology based on a holographic method, whose high-resolution capability has been demonstrated in the microelectronics industry, will be adapted and applied to these communication applications. The work will include the development of e-beam lithography for manufacturing high-frequency grating masks, the construction of equipment for recording full-field, "off-axis" holograms from these masks, and the application and evaluation of the off-axis holographic technology for manufacturing the next-generation WDM DFB lasers and SAW devices. BE97-5124

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Coordinator

Alcatel Alsthom Recherche
EU contribution
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Address
Route de Nozay
91460 Marcoussis
France

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Participants (4)