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X-ray expert system for electronic films quality improvement (ESQUI)

Objective

The project aims to develop an instrument for X-Ray diffractometry and X-Ray reflectivity dedicated to measurements of film thickness, crystalline phase, texture and residual stress of supported thin film dedicated to microelectroncis materials and devices. The design of such instrument will address the need of a non-destructive, fast and user friendly technique able to characterize thin film for the microelectronics industry. The project aims to provide a tool that overcomes the intrinsic limitation that ellipsometry has on ultra thin film thickness measurements, providing additional fundamental information on this films and delivering them in a user friendly form facilitating development of new processes in microelectronics. An expert system will be developed where appropriate computing algorithm for data interpretation and a friendly graphical user interface will be optimized according to the need of the end user.

Funding Scheme

CSC - Cost-sharing contracts

Coordinator

ITALIAN INSTITUTE FOR THE PHYSICS OF MATTER
Address
Via C. Olivetti 2
20041 Agrate Brianza
Italy

Participants (6)

CONSEJO SUPERIOR DE INVESTIGACIONES CIENTIFICAS
Spain
Address
S/n,cantoblanco S/n
28049 Madrid
INEL INC.
France
Address
Street Chemin Dpt 405
45410 Artenay
ITAL STRUCTURES DI PASTI FABIO
Italy
Address
Via Monte Misone Zona Industriale Baltera
38066 Riva Del Garda
STMICROELECTRONICS S.R.L.
Italy
Address
Via C. Olivetti 2
20041 Agrate Brianza
UNIVERSIT DEGLI STUDI DI TRENTO
Italy
Address
Via Mesiano 77
38050 Bieno
UNIVERSITE DU MAINE
France
Address
Bd O. Messiaen
72017 Le Mans