Objective This project addresses the technology for Non Volatile Memories, both embedded and stand-alone, for the 0.15µm generations and beyond. One of the main limitations is presently given by the difficulty in reducing the thickness of tunnel and interpoly dielectric, due to reliability problems, connected to the stress induced leakage, which in turn impacts the scalability of the memory cell and the programming speed. The target of the project is to achieve a reduction of 20-25% in the tunnel oxide thickness and in the interpoly dielectric equivalent thickness, while keeping the same reliability, achieved with present gate oxide thickness. The result will be achieved by an in depth investigation of the physical mechanisms causing the leakage currents, and its dependence on process parameters and programming conditions, and it will be demonstrated at the end of the project on large cell arrays by the industrial partners. Fields of science natural sciencesphysical scienceselectromagnetism and electronicssemiconductivity Programme(s) FP5-IST - Programme for research, technological development and demonstration on a "User-friendly information society, 1998-2002" Topic(s) 1.1.2.-4.8.3 - Processes, equipment and materials Call for proposal Data not available Funding Scheme CSC - Cost-sharing contracts Coordinator STMICROELECTRONICS S.R.L. EU contribution No data Address VIA OLIVETTI 2 20041 AGRATE BRIANZA Italy See on map Total cost No data Participants (4) Sort alphabetically Sort by EU Contribution Expand all Collapse all COMMISSARIAT A L'ENERGIE ATOMIQUE France EU contribution No data Address 31-33 RUE DE LA FEDERATION 75752 PARIS CEDEX 15 See on map Total cost No data INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM VZW Belgium EU contribution No data Address KAPELDREEF 75 3001 LEUVEN See on map Total cost No data PHILIPS INNOVATIVE TECHNOLOGY SOLUTIONS NV Belgium EU contribution No data Address INTERLEUVENLAAN 80 3001 HEVERLEE See on map Total cost No data POLITECNICO DI MILANO Italy EU contribution No data Address PIAZZA LEONARDO DA VINCI 32 20133 MILANO See on map Total cost No data
