Objective European Flat Panel Display manufacturers have to introduce lower cost processes by using very large substrates (1m2) in order to be competitive and to gain market share. The main technological barrier for scaling up production reactors is Reactive Ion Etching (RIE) for which there is no technological solution on the market. The present project proposes the development of RIE process enabling 1 m2 substrate processing for two of the most promising display technologies:1. Active Matrix crystal Displays for computer screens.2. Organic Light emission displays for automotive applications. The project is based on a new principle of plasma source patented by one of the partners, which allows the production of a high density plasma over 1m2 with excellent homogeneity. The project proposes to develop RIE process for the 2 applications mentioned on small scale reactors, transfer it to an industrial prototype (1m2) and validate the process for betaHigh plasma generation over the whole source area (1011 ions.cm-3);- Promising results of preliminary etching tests (uniformity better than 10% over 70 x 70 cm2);- Gas mixture optimized to increase etching selectivity (Si02/Si) and ITO/Glass;- The procedure of substrate characterisation for OLED applications. Fields of science engineering and technologymaterials engineering Programme(s) FP5-GROWTH - Programme for research technological development and demonstration on "Competitive and sustainable growth 1998-2002" Topic(s) 1.1.3.-5. - RTD Activities of a Generic Nature : materials and their technologies for production and transformation and new and improved materials and production technologies in the steel field Call for proposal Data not available Funding Scheme CSC - Cost-sharing contracts Coordinator CENTRO RICERCHE FIAT S.C.P.A. EU contribution No data Address Strada torino 50 10043 Orbassano Italy See on map Total cost No data Participants (5) Sort alphabetically Sort by EU Contribution Expand all Collapse all COMMISSARIAT A L'ENERGIE ATOMIQUE France EU contribution No data Address Rue des martyrs 17 38054 Grenoble See on map Total cost No data COMMISSION OF THE EUROPEAN COMMUNITIES Italy EU contribution No data Address Via enrico fermi 1 21020 Ispra See on map Total cost No data EUROINKS SRL Italy EU contribution No data Address Via setteponti 143/1 52100 Arezzo See on map Total cost No data FHR - FENDLER, HENPSCH, RAENCH ANLAGENBAU GMBH Germany EU contribution No data Address 41,am huegel 2 01458 Ottendorf - okrilla See on map Total cost No data THALES S.A. France EU contribution No data Address Domaine de corbeville 91404 Orsay See on map Total cost No data