Objetivo European Flat Panel Display manufacturers have to introduce lower cost processes by using very large substrates (1m2) in order to be competitive and to gain market share. The main technological barrier for scaling up production reactors is Reactive Ion Etching (RIE) for which there is no technological solution on the market. The present project proposes the development of RIE process enabling 1 m2 substrate processing for two of the most promising display technologies:1. Active Matrix crystal Displays for computer screens.2. Organic Light emission displays for automotive applications. The project is based on a new principle of plasma source patented by one of the partners, which allows the production of a high density plasma over 1m2 with excellent homogeneity. The project proposes to develop RIE process for the 2 applications mentioned on small scale reactors, transfer it to an industrial prototype (1m2) and validate the process for betaHigh plasma generation over the whole source area (1011 ions.cm-3);- Promising results of preliminary etching tests (uniformity better than 10% over 70 x 70 cm2);- Gas mixture optimized to increase etching selectivity (Si02/Si) and ITO/Glass;- The procedure of substrate characterisation for OLED applications. Ámbito científico engineering and technologymaterials engineering Programa(s) FP5-GROWTH - Programme for research technological development and demonstration on "Competitive and sustainable growth 1998-2002" Tema(s) 1.1.3.-5. - RTD Activities of a Generic Nature : materials and their technologies for production and transformation and new and improved materials and production technologies in the steel field Convocatoria de propuestas Data not available Régimen de financiación CSC - Cost-sharing contracts Coordinador CENTRO RICERCHE FIAT S.C.P.A. Aportación de la UE Sin datos Dirección Strada Torino 50 10043 ORBASSANO Italia Ver en el mapa Coste total Sin datos Participantes (5) Ordenar alfabéticamente Ordenar por aportación de la UE Ampliar todo Contraer todo COMMISSARIAT A L'ENERGIE ATOMIQUE Francia Aportación de la UE Sin datos Dirección Rue des Martyrs 17 38054 GRENOBLE Ver en el mapa Coste total Sin datos COMMISSION OF THE EUROPEAN COMMUNITIES Italia Aportación de la UE Sin datos Dirección Via Enrico Fermi 1 21020 ISPRA Ver en el mapa Coste total Sin datos EUROINKS SRL Italia Aportación de la UE Sin datos Dirección Via Setteponti 143/1 52100 AREZZO Ver en el mapa Coste total Sin datos FHR - FENDLER, HENPSCH, RAENCH ANLAGENBAU GMBH Alemania Aportación de la UE Sin datos Dirección 41,Am Huegel 2 01458 OTTENDORF - OKRILLA Ver en el mapa Coste total Sin datos THALES S.A. Francia Aportación de la UE Sin datos Dirección Domaine de Corbeville 91404 ORSAY Ver en el mapa Coste total Sin datos