Community Research and Development Information Service - CORDIS

Spatially resolved subsurface characterization of semiconductor wafers by high resolution x-ray diffraction

From 2001-02-28 to 2002-02-27

Project details

Total cost:

EUR 128 000

EU contribution:

EUR 128 000

Coordinated in:

Germany

Objective

Coordinator

FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
Germany
Krügerstraße 22
01326 WEISSIG - DRESDEN
Germany
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Administrative contact: Henning METZLAFF
E-mail
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