Community Research and Development Information Service - CORDIS

Metrology of Critical Dimensions on Reticle

From 2001-06-01 to 2002-06-30

Project details

Total cost:

EUR 2 111 128

EU contribution:

EUR 1 495 659

Coordinated in:

United Kingdom

Funding scheme:

ACM - Preparatory, accompanying and support measures

Objective

Coordinator

COMPUGRAPHICS INTERNATIONAL LIMITED
United Kingdom
EASTFIELD INDUSTRIAL ESTATE, NEWARK ROAD NORTH
KY7 4NT GLENROTHES
United Kingdom
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Administrative contact: Anthony GRIMSHAW
Tel.: +44-15-92772557
Fax: +44-15-92775359
E-mail

Participants

INFINEON TECHNOLOGIES AG
Germany
ST. MARTIN STRASSE 53
81609 MUENCHEN
Germany
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Administrative contact: Thomas SCHATZ
Tel.: +49-89-23423887
Fax: +49-89-23424676
E-mail
INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM VZW
Belgium
KAPELDREEF 75
3001 LEUVEN
Belgium
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Administrative contact: Rik JONCKHEERE
Tel.: +32-16-281340
Fax: +32-16-281214
E-mail
MUETEC AUTOMATISIERTE MIKROSKOPIE UND MESSTECHNIK GMBH
Germany
WILDERMUTHSTRASSE 88
80993 MUENCHEN
Germany
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Administrative contact: Gerd SCHEURING
Tel.: +49-89-1411066
Fax: +49-89-1411067
E-mail
PDF SOLUTIONS GMBH
Germany
BAYERSTRASSE 115/9
80335 MUENCHEN
Germany
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Administrative contact: Kai PETER
Tel.: +49-89-76706233
Fax: +49-89-76706211
E-mail
TAIWAN MASK CORPORATION
Taiwan
NO. 11, INNOVATION RD. I,
300 SCIENCE-BASED INDUSTRIAL PARK, HSINCHU,
Taiwan
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Administrative contact: Parkson CHEN
Tel.: +88-63-5781370
Fax: +88-63-5780752
E-mail
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