Community Research and Development Information Service - CORDIS

Advanced Photomask Resist Processing

From 2001-07-01 to 2002-08-31

Project details

Total cost:

EUR 2 498 996

EU contribution:

EUR 2 021 145

Coordinated in:

Germany

Funding scheme:

ACM - Preparatory, accompanying and support measures

Objective

Coordinator

INSTITUT FUER MIKROELEKTRONIK STUTTGART
Germany
ALLMANDRING 30 A+C
70569 STUTTGART
Germany
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Administrative contact: Mathias IRMSCHER
Tel.: +49-71-16855779
Fax: +49-71-16855930
E-mail

Participants

INFINEON TECHNOLOGIES AG
Germany
ST. MARTIN STRASSE 53
81609 MUENCHEN
Germany
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Administrative contact: Inge VERMEIR
Tel.: +49-89-23421450
Fax: +49-89-23428038
E-mail
LEICA MICROSYSTEMS LITHOGRAPHY GMBH
Germany
GOESCHWITZER STRASSE 42
07745 JENA
Germany
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Administrative contact: Peter HUDEK
Tel.: +49-36-41651969
Fax: +49-36-41651922
E-mail
PHOTRONICS (UK) LTD.
United Kingdom
TRAFFORD WHARF ROAD, TRAFFORD PARK
M17 1PE MANCHESTER
United Kingdom
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Administrative contact: Jeff BROWNE
Tel.: +44-16-19304815
Fax: +44-16-19304852
E-mail
SCHOTT LITHOTEC AG
Germany
OTTO-SCHOTT-STRASSE 13
07745 JENA
Germany
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Administrative contact: Ute BUTTGEREIT
Tel.: +49-36-93522274
Fax: +49-36-93522101
E-mail
STEAG HAMATECH AG
Germany
FERDINAND-VON-STEIBEIS-RING 10
75447 STERNENFELS
Germany
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Administrative contact: Jakob SZEKERESCH
Tel.: +49-70-4541231
Fax: +49-70-4541239
E-mail
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