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Micro Acoustic Sensor System for CO2 Tracking

Objective

Indoor air quality is a major concern both in terms of human health aspects and efficient use of energy resources. Tracking of CO2 levels with sensitive, low-cost sensors will open up numerous new applications such as demand-control ventilation and monitoring instruments. Respiratory health care is a second area where CO2 sensors are key elements. The objective of this project is the development of a demonstrator CO2 sensor microsystem and to prove that silicon MEMS technology is feasible for the realization of a range of sensor microsystems with adequate performance at a very low production cost. The project will result in a demonstration of the technology in addition to the definition of a mass-producible product aimed at the main application area. Key partners for the industrialization phase and potential users will be identified.

Objectives:
The main objective of our concerted project is to demonstrate that silicon MEMS technology is feasible for the realisation of a range of sensors and microsystems for indoor air quality control, respiratory health care and related applications, and that specified performance may be obtained at very low production cost.

The feasibility demonstration will be a two-year process including the following stages: Specification, partitioning, interfacing, modelling, simulation, MEMS implementation, electronic design, prototyping, characterisation, and technology implementation.

The consortium consists of three partners with complimentary skills and capabilities. One industrial partner is in possession of adequate MEMS fabrication technology, and experience of high volume production. A second industrial partner brings an innovative solution to the assigned problem area. A third partner brings expertise, R&D skills and capacity to the project.

Work description:
The project is divided into six major workpackages with active involvement and interaction of the three partner organizations and some additional support of subcontractors for realization of onboard electronic functionality through MPW services.

The workpackages are:
- Specifications, partitioning, interfacing
- Modelling, simulation and MEMS implementation
- Prototyping
- Electronic interface design and verification
- Characterisation
- Technology implementation.
In addition, a seventh workpackage provides project management and coordination.

A key element here is that the partners have agreed to an early completion of a Consortium Agreement. Each workpackage has an identified responsible partner and is structured into separate tasks with clearly indicated milestones and deliverables. All three project partners have accumulated extensive experience from participation in international cooperative R&D projects, and have the necessary infrastructure in place; they can refer to previous success stories of completed projects which have required a great amount of concurrent development and engineering.

Milestones:
The main results of the project are:
- Demonstrator samples tested to conform with specifications and characteristics established in the first phase of the project;
- A technology implementation plan which includes aspects of higher system levels, dissemination and which stakes out the path to an industrialized, mass-producible product.

Funding Scheme

CSC - Cost-sharing contracts

Coordinator

SENSONOR ASA
Address
Knudsroedveien 7
3189 Horten
Norway

Participants (2)

HOEK INSTRUMENT AB
Sweden
Address
Flottiljgatan 55
721 31 Vaesteraas
SINTEF - STIFTELSEN FOR INDUSTRIELL OG TEKNISK FORSKNING VED NORGES TEKNISKE HOEGSKOLE
Norway
Address
Strindveien 4
7034 Trondheim