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Development of a smart nanorobot for sensor-based handling in a scanning electron microscope

Objective

In ROBOSEM, a nanohandling robot system for a desktop SEM station will be developed, with a powerful sensory support and very high flexibility. The robots' modular design and their simple installation in an SEM will allow an easy conversion of the station for different applications. For telemanipulation mode, a haptic interface will be developed and a virtual reality representation of the working environment investigated. A robot with sensor feedback from video cameras and force microsensors will be developed. To ensure real-time processing of sensor data, a PC-based parallel computer system will be developed and special techniques of data processing, implemented. Three prototypes will be build up and evaluated: microassembly in an SEM, nanotesting in an SEM and cell handling for genomics. The main innovation of ROBOSEM is the first-time development of a flexible robot-based nanohandling SEM desktop station.

Funding Scheme

CSC - Cost-sharing contracts
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Coordinator

KURATORIUM OFFIS E.V.
Address
Escherweg 2
26121 Oldenburg
Germany

Participants (14)

ALICONA IMAGING GMBH
Austria
Address
Parkring 2
8074 Raaba
CARL ZEISS NTS GMBH
Germany
Address
Carl Zeiss Strasse 56
73447 Oberkochen
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
France
Address
Rue Michel-ange 3
75794 Paris
DR. VOLKER KLOCKE NANOTECHNIK
Germany
Address
Pascalstrasse 17
52076 Aachen
FUNDACION ROBOTIKER
Spain
Address
Parque Tecnológico, Edificio 202
48170 Zamudio
INSTITUTE OF ELECTRON TECHNOLOGY
Poland
Address
32/46,Al. Lotnikow 32/46
02 668 Warszawa
MICRO-BEAM SARL
Switzerland
Address
Rue De La Cote109
2000 Neuchatel
NANOSCALE TECHNOLOGIES GMBH
Germany
Address
Ludwig-erhard Strasse 10
34131 Kassel
POINT ELECTRONIC GMBH
Germany
Address
Ackerweg 104
06130 Halle (Saale)
PROGENIKA BIOPHARMA S.A.
Spain
Address
El Carmen, 38 Bis
48901 Vizcaya - Baracaldo
SWISS CENTER FOR ELECTRONICS AND MICROTECHNOLOGY S.A.
Switzerland
Address
Rue Jaquet Droz 1
2007 Neuchatel
SWISS FEDERAL INSTITUTE OF TECHNOLOGY LAUSANNE
Switzerland
Address
Epfl - Ecublens
1015 Lausanne
SWISS FEDERAL LABORATORIES FOR MATERIALS TESTING AND RESEARCH
Switzerland
Address
39,Feuerwerkerstrasse 39
3602 Thun
UNIVERSIDAD DE NAVARRA
Spain
Address
192
31080 Pamplona