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Development of a smart nanorobot for sensor-based handling in a scanning electron microscope

Objective

In ROBOSEM, a nanohandling robot system for a desktop SEM station will be developed, with a powerful sensory support and very high flexibility. The robots' modular design and their simple installation in an SEM will allow an easy conversion of the station for different applications. For telemanipulation mode, a haptic interface will be developed and a virtual reality representation of the working environment investigated. A robot with sensor feedback from video cameras and force microsensors will be developed. To ensure real-time processing of sensor data, a PC-based parallel computer system will be developed and special techniques of data processing, implemented. Three prototypes will be build up and evaluated: microassembly in an SEM, nanotesting in an SEM and cell handling for genomics. The main innovation of ROBOSEM is the first-time development of a flexible robot-based nanohandling SEM desktop station.

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Coordinator

KURATORIUM OFFIS E.V.

Address

Escherweg 2
26121 Oldenburg

Germany

Administrative Contact

Hans-Jürgen APPELRATH (Prof. Dr.)

Participants (14)

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ALICONA IMAGING GMBH

Austria

CARL ZEISS NTS GMBH

Germany

CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE

France

DR. VOLKER KLOCKE NANOTECHNIK

Germany

FUNDACION ROBOTIKER

Spain

INSTITUTE OF ELECTRON TECHNOLOGY

Poland

MICRO-BEAM SARL

Switzerland

NANOSCALE TECHNOLOGIES GMBH

Germany

POINT ELECTRONIC GMBH

Germany

PROGENIKA BIOPHARMA S.A.

Spain

SWISS CENTER FOR ELECTRONICS AND MICROTECHNOLOGY S.A.

Switzerland

SWISS FEDERAL INSTITUTE OF TECHNOLOGY LAUSANNE

Switzerland

SWISS FEDERAL LABORATORIES FOR MATERIALS TESTING AND RESEARCH

Switzerland

UNIVERSIDAD DE NAVARRA

Spain

Project information

Grant agreement ID: G1RD-CT-2002-00675

  • Start date

    1 April 2002

  • End date

    30 June 2005

Funded under:

FP5-GROWTH

  • Overall budget:

    € 4 858 635

  • EU contribution

    € 2 207 586

Coordinated by:

KURATORIUM OFFIS E.V.

Germany