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Magnetic Films for MEMS applications

Objective

The aim of this project is the development of new permanent magnet film based devices which could be used in micro-motors, micro-generators, sensors and read heads and help to significantly reduce the size, weight, and cost of these devices. The proposal focuses first on the development of nanostructured magnetic materials with low temperature processes compatible with microelectronics environment. The second aim of the project is to develop processes for small hard magnetic element fabrication down to sumicron sizes which can be used inconventional clean room facilities and at low temperature. Manufacturing aspects of permanent magnets films as well as the modelling, realization and evaluation of new miniaturised devices which will incorporate these small permanent magnets are included in this project.

Objectives:
1. A mastering of the growth of permanent magnet films at low temperature using both conventional and wholly novel deposition technologies;
2. Mastering of small permanent magnets fabrication and characterisation with sizes down to submicron;
3. Explore new etching technologies for thick permanent magnet films;
4. Development of modelling tools for permanent magnet based devices;
5. Production of four microsystems using permanent magnet films instead of normal size magnets. The four devices will be characterised fully through modelling and measurement on adapted test benches. These devices are a GMR sensor, a micro generator, a micromotor and a micro switch.

Work description:
The work is separated into two main parts.

I The mastering of the growth and patterning of thin and thick permanent magnet films. Standard operating procedures will be defined by the industrial partners by the beginning of the work. Films will be deposited using various techniques compatible with industrial processes (low cost and low temperature deposition). These films will be first characterised and after patterned in small permanent magnet with various shapes and sizes. The stability and magnetic properties of these small magnets will be investigated as function of size, material and deposition conditions. The results will be analysed with the help of micromagnetic calculations and 3D flux.

II The building of the demonstrators. Study of the commercial market and production possibilities:
- Standard operation procedures definition;
- Modelling of magnetic fields produced in heterogeneous structures by Films Permanent Magnets;
- Dimensioning of different demonstrators and selection of those to be built;
- Study of the technological steps by using microelectronic means as for example deposition techniques (evaporation, sputtering, electrochemical and vapour deposition) in order to obtain insulating and metallic thin film materials;
- UV lithography means for microstructure patterning, etching techniques (ion milling, reactive ion etching, OE) and planarisation techniques (mechanical or chemico-mechanical processes);
- mounting and testing of the demonstrator.

Milestones:
The major milestones are: Thin films with optimised deposition procedure and magnetic properties, production of small magnets with enough good properties, Midterm assessment, Thick films deposition and etching. Demonstrators provided.
The expected results are: A mastering of the growth of permanent magnet films, Modelling tools for permanent magnet based devices, Demonstrators fabrication patenting, A workshop.

Funding Scheme

CSC - Cost-sharing contracts

Coordinator

COMMISSARIAT A L'ENERGIE ATOMIQUE
Address
31-33 Rue De La Federation
75752 Paris Cedex 15
France

Participants (7)

CEDRAT TECHNOLOGIES
France
Address
10 Chemin De Pre Carre
38240 Meylan
COMMISSARIAT A L'ENERGIE ATOMIQUE
France
Address
31-33 Rue De La Federation
75752 Paris Cedex 15
ETA SA, FABRIQUES D'EBAUCHES
Switzerland
Address
Schild-rust-strasse 17
2540 Grenchen
NATIONAL CENTRE FOR SCIENTIFIC RESEARCH "DEMOKRITOS"
Greece
Address

15310 Aghia Paraskevi Attikis
QINETIQ LIMITED
United Kingdom
Address
85 Buckingham Gate
SW1E 6PD London
THE PROVOST FELLOWS AND SCHOLARS OF THE COLLEGE OF THE HOLY AND UNDIVIDED TRINITY OF QUEEN ELIZABETH NEAR DUBLIN
Ireland
Address
College Green
2 Dublin
UNIVERSIDAD COMPLUTENSE DE MADRID
Spain
Address
Avenida Seneca 2 Edificio Seneca
28040 Madrid