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CMOS backbone for 2010 e-Europe "NANOCMOS" From the 45 nm node down to the limits

CMOS backbone for 2010 e-Europe "NANOCMOS" From the 45 nm node down to the limits

Objective

NANOCMOS is a project integrating in a coherent structure, activities that in the past have been the object of ESPRIT/IST, JESSI/MEDEA projects in the field of CMOS technologies. It focuses on the RTD activities necessary to develop the 45nm, 32nm and below CMOS technologies. From these technology nodes it will be mandatory to introduce revolutionary changes in the materials, process modules, device and metallisation architectures and all related characterization, test, modelling and simulation technologies, to keep the scaling trends viable and make all future IST applications possible. NANOCMOS covers all these aspects. The project includes as well important Training and Dissemination activities. A professional Management structure will be implemented.

The first objective of the project is the demonstration of feasibility of Front-End and Back-End process modules of the 45nm node CMOS logic technology. The project intents to process as demonstrator a very aggressive SRAM chip displaying worldwide best characteristics. This objective will be achieved within two years from project start. The second objective of the project is to realize exploratory research on critical issues of the materials, devices, interconnect and related characterization and modelling to start preparing the 32/22 nodes considered to be within the limits of the CMOS technologies. The third objective of the project is to prepare the take up of results described in the Objective I and implement a 45nm Full Logic CMOS Process Integration in 300mm wafers by the end of 2007. This integration will be part of a separate MEDEA+ project.

NANOCMOS initial Consortium gathers most of best competences existing in Europe in the domain. It is expected to incorporate new partners, to fulfil already identified tasks. NANOCMOS places Europe on a privileged position in the competition to develop the enabling technologies of the 2010 e-Society.

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Coordinator

STMICROELECTRONICS SA

Address

29 Boulevard Romain Rolland
92120 Montrouge

France

Administrative Contact

Participants (23)

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ACIES SARL

France

CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE

France

COMMISSARIAT A L'ENERGIE ATOMIQUE

France

DOLPHIN INTEGRATION

France

ECOLE CENTRALE DE LYON - CRELYMO

France

FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.

Germany

FREESCALE SEMICONDUCTEURS CENTRE DE RECHERCHE CROLLES SAS

France

INFINEON TECHNOLOGIES AG

Germany

INSTITUT NATIONAL DES SCIENCES APPLIQUEES DE LYON

France

INSTITUT NATIONAL POLYTECHNIQUE DE GRENOBLE

France

INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM VZW

Belgium

ION BEAM SERVICES

France

MAGWEL NV

Belgium

PHILIPS ELECTRONICS NEDERLAND B.V.

Netherlands

PHILIPS INNOVATIVE TECHNOLOGY SOLUTIONS NV

Belgium

PHILIPS SEMICONDUCTORS CROLLES R&D

France

QIMONDA DRESDEN GMBH & CO.OHG

Germany

QIMONDA FLASH GMBH & CO. KG

Germany

STMICROELECTRONICS CROLLES 2 SAS

France

STMICROELECTRONICS S.R.L.

Italy

TECHNISCHE UNIVERSITAET CHEMNITZ

Germany

UNIVERSITE JOSEPH FOURIER GRENOBLE 1

France

UNIVERSITE PARIS-SUD

France

Project information

Grant agreement ID: 507587

  • Start date

    1 March 2004

  • End date

    30 June 2006

Funded under:

FP6-IST

  • Overall budget:

    € 46 248 912

  • EU contribution

    € 24 167 000

Coordinated by:

STMICROELECTRONICS SA

France