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CMOS backbone for 2010 e-Europe "NANOCMOS" From the 45 nm node down to the limits

Objective

NANOCMOS is a project integrating in a coherent structure, activities that in the past have been the object of ESPRIT/IST, JESSI/MEDEA projects in the field of CMOS technologies. It focuses on the RTD activities necessary to develop the 45nm, 32nm and below CMOS technologies. From these technology nodes it will be mandatory to introduce revolutionary changes in the materials, process modules, device and metallisation architectures and all related characterization, test, modelling and simulation technologies, to keep the scaling trends viable and make all future IST applications possible. NANOCMOS covers all these aspects. The project includes as well important Training and Dissemination activities. A professional Management structure will be implemented.

The first objective of the project is the demonstration of feasibility of Front-End and Back-End process modules of the 45nm node CMOS logic technology. The project intents to process as demonstrator a very aggressive SRAM chip displaying worldwide best characteristics. This objective will be achieved within two years from project start. The second objective of the project is to realize exploratory research on critical issues of the materials, devices, interconnect and related characterization and modelling to start preparing the 32/22 nodes considered to be within the limits of the CMOS technologies. The third objective of the project is to prepare the take up of results described in the Objective I and implement a 45nm Full Logic CMOS Process Integration in 300mm wafers by the end of 2007. This integration will be part of a separate MEDEA+ project.

NANOCMOS initial Consortium gathers most of best competences existing in Europe in the domain. It is expected to incorporate new partners, to fulfil already identified tasks. NANOCMOS places Europe on a privileged position in the competition to develop the enabling technologies of the 2010 e-Society.

Funding Scheme

IP - Integrated Project

Coordinator

STMICROELECTRONICS SA
Address
29 Boulevard Romain Rolland
92120 Montrouge
France

Participants (23)

ACIES SARL
France
Address
69 Rue De La Republique
69002 Lyon
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
France
Address
3, Rue Michel-ange
75794 Paris Cedex 16
COMMISSARIAT A L'ENERGIE ATOMIQUE
France
Address
31-33 Rue De La Federation
75752 Paris Cedex 15
DOLPHIN INTEGRATION
France
Address
Avenue Du Granier 39
38240 Meylan
ECOLE CENTRALE DE LYON - CRELYMO
France
Address
36, Avenue Guy De Collongue
69134 Ecully Cedex
FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
Germany
Address
Hansastrasse 27C
80686 Muenchen
FREESCALE SEMICONDUCTEURS CENTRE DE RECHERCHE CROLLES SAS
France
Address
Avenue Du General Eisenhower
31100 Toulouse
INFINEON TECHNOLOGIES AG
Germany
Address
St. Martin Strasse 53
81609 Muenchen
INSTITUT NATIONAL DES SCIENCES APPLIQUEES DE LYON
France
Address
20, Avenue Albert Einstein
69621 Villeurbanne Cedex
INSTITUT NATIONAL POLYTECHNIQUE DE GRENOBLE
France
Address
46 Avenue Felix Viallet
38031 Grenoble Cedex 1
INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM VZW
Belgium
Address
Kapeldreef 75
3001 Leuven
ION BEAM SERVICES
France
Address
Rue Gaston Imbert Prolongee, Zi Peynier Rousset
13790 Rousset
MAGWEL NV
Belgium
Address
Kapeldreef, 75
3001 Heverlee
PHILIPS ELECTRONICS NEDERLAND B.V.
Netherlands
Address
Boschdijk 525
5621 JG Eindhoven
PHILIPS INNOVATIVE TECHNOLOGY SOLUTIONS NV
Belgium
Address
Interleuvenlaan 80
Heverlee
PHILIPS SEMICONDUCTORS CROLLES R&D
France
Address
860 Rue Jean Monnet
38920 Crolles
QIMONDA DRESDEN GMBH & CO.OHG
Germany
Address
Koenigsbruecker Strasse 180
01099 Dresden
QIMONDA FLASH GMBH & CO. KG
Germany
Address
Koenigsbruecker Strasse 180
01099 Dresden
STMICROELECTRONICS CROLLES 2 SAS
France
Address
850 Rue Jean Monnet
38920 Crolles
STMICROELECTRONICS S.R.L.
Italy
Address
Via Olivetti 2
20041 Agrate Brianza
TECHNISCHE UNIVERSITAET CHEMNITZ
Germany
Address
Strasse Der Nationen 62
09107 Chemnitz
UNIVERSITE JOSEPH FOURIER GRENOBLE 1
France
Address
621 Avenue Centrale - Domaine Universitaire
38400 Saint Martin D'heres
UNIVERSITE PARIS-SUD
France
Address
15, Rue Georges Clemenceau
91405 Orsay Cedex