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Nano-structured solid-state gas sensors with superior performances

Nano-structured solid-state gas sensors with superior performances

Objective

The main objective of NANOS4 is a breakthrough in advanced micro- and nano-technologies for developing innovative metal-oxide gas sensing systems based on mesoscopic sensors. The sensors will be fabricated by nanoengineering techniques like vapour phase transport process crystal growth and other advanced techniques of preparation. Optical, ion and electron beam nanolithography will be a tool for selective removal of materials. The materials will be deposited as sensor arrays over micromachined semiconductor substrates with surfaces suitable for high-temperature growth of metal oxides. Beside the ambition of the project is to incorporate the arrays into miniaturised low-power-consumption gas sensing systems equipped with tiny micro-chambers operated in an active sampling mode as micro-reactors. The systems will operate with power-consumption budgets comparable to a single commercial thick-film gas sensing element, featuring at the same time superior gas distinction, drift compensation as well as self-test functionalities. The NANOS4 proposal is mainly driven by the following markets needs: innovative sub-system technology for increasing safety, comfort and economy of flying in large passenger aircrafts and in vehicles, early detection of smouldering fires, reliable and cost effective monitoring of environmental odour nuisances and workplace safety.

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Coordinator

CONSIGLIO NAZIONALE DELLE RICERCHE

Address

Piazzale Aldo Moro 7
Roma

Italy

Administrative Contact

Giorgio SBERVEGLIERI (Prof.)

Participants (9)

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CONSIGLIO NAZIONALE DELLE RICERCHE

Italy

EUROPEAN AERONAUTIC DEFENSE AND SPACE COMPANY - EADS DEUTSCHLAND GMBH

Germany

VAISALA OYJ

Finland

LABORATORI INTEGRATI STUDIO ALFA SRL

Italy

SACMI COOPERATIVA MECCANICI IMOLA SCARL

Italy

APPARATEBAU GAUTING GMBH.

Germany

UNIVERSITAT DE BARCELONA

Spain

FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.

Germany

INSTITUT NATIONAL POLYTECHNIQUE DE GRENOBLE

France

Project information

Grant agreement ID: 1528

  • Start date

    1 January 2004

  • End date

    31 March 2007

Funded under:

FP6-NMP

  • Overall budget:

    € 4 807 957

  • EU contribution

    € 2 977 266

Coordinated by:

CONSIGLIO NAZIONALE DELLE RICERCHE

Italy