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Emerging Nanopatterning Methods

Project information

Grant agreement ID: 500120

  • Start date

    1 March 2004

  • End date

    29 February 2008

Funded under:

FP6-NMP

  • Overall budget:

    € 31 134 082

  • EU contribution

    € 15 994 871

Coordinated by:

VTT VALTION TEKNILLINEN TUTKIMUSKESKUS

Finland

Objective

The growing importance of nanotechnology for the European Research Area is reflected in theFP6 Thematic Priorities. It is foreseen that most of the projects submitted to the Priority Area 3 (NMP) will need and develop nanopatterning techniques in one way or another. The Emerging Nanopatterning Methods (NaPa) consortium integrates the new patterning methods into one project, both anticipating and responding to the increasing need for technologies, standards and metrology required to harness the new application-relevant properties of engineered structures with nm-scale features. The NaPa consortium complements the deep UV technology by providing low-cost scalable processes and tools to cover the needs of nanopatterning from CMOS back-end processes through photonics to biotechnology. To achieve this, research in three technology strands is proposed: nanoimprint lithography, soft lithography & self-assembly and MEMS-based nanopatterning. While the former is at a crucial embryonic stage, requiring prompt consolidation to yield its first products in one or two years, the other two will result in applications towards the end of the project. Research in three overarching themes required by all strands: Materials, Tools and Simulation will be undertaken. NaPa brings together 35 leading academic and industrial European institutions with a vast amount of recent know-how on nanofabrication, partly developed within FP5. In total, 3500 person months will be contributed by the partners to the project. Complementing R&D, the consortium will design exciting nanoscience and nanoengineering courses to advance the training of the next generation of scientists and engineers and to create a positive attitude towards science among young people. Dissemination activities towards the lay public and sectors underrepresented in nanotechnology form an integral part in NaPa.

Coordinator

VTT VALTION TEKNILLINEN TUTKIMUSKESKUS

Address

Vuorimiehentie 3
Espoo

Finland

Participants (31)

ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE

Switzerland

IBM RESEARCH GMBH

Switzerland

CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE

France

MICRO RESIST TECHNOLOGY GMBH

Germany

UNIVERSITY COLLEGE CORK, NATIONAL UNIVERSITY OF IRELAND, CORK

Ireland

SUSS MICROTEC LITHOGRAPHY GMBH

Germany

CENTRE SUISSE D'ELECTRONIQUE ET DE MICROTECHNIQUE S.A.

Switzerland

AMO GMBH - GESELLSCHAFT FUER ANGEWANDTE MIKRO- UND OPTOELEKTRONIK MBH

Germany

FUNDACION CIDETEC - CENTRO DE TECNOLOGICAS ELECTROQUIMICAS

Spain

CONSEJO SUPERIOR DE INVESTIGACIONES CIENTIFICAS

Spain

EV GROUP E. THALLNER GMBH

Austria

INSTITUTE OF MICROELECTRONICS TECHNOLOGY RAS

Russia

FUNDACION INASMET

Spain

CONSIGLIO NAZIONALE DELLE RICERCHE

Italy

CONSIGLIO NAZIONALE DELLE RICERCHE

Italy

COMMISSARIAT A L'ENERGIE ATOMIQUE

France

LINKOEPINGS UNIVERSITET

Sweden

LUNDS UNIVERSITET

Sweden

UNIVERSITEIT TWENTE

Netherlands

DANMARKS TEKNISKE UNIVERSITET

Denmark

BIOSENSIA LIMITED

Ireland

NANOPLUS NANOSYSTEMS AND TECHNOLOGIES GMBH

Germany

NPL MANAGEMENT LIMITED

United Kingdom

OBDUCAT AB

Sweden

PAUL SCHERRER INSTITUT

Switzerland

FUNDACION TEKNIKER

Spain

UNIVERSITY OF GLASGOW

United Kingdom

POLITECHNIKA WARSZAWSKA

Poland

SUSS MICROTEC S.A.S.

France

SMART EQUIPMENT TECHNOLOGY SAS - S.E.T SAS

France

CENTRO RICERCHE FIAT SOCIETÀ CONSORTILE PER AZIONI

Italy

Project information

Grant agreement ID: 500120

  • Start date

    1 March 2004

  • End date

    29 February 2008

Funded under:

FP6-NMP

  • Overall budget:

    € 31 134 082

  • EU contribution

    € 15 994 871

Coordinated by:

VTT VALTION TEKNILLINEN TUTKIMUSKESKUS

Finland