Community Research and Development Information Service - CORDIS

FP6

OCSLI

Project ID: 001854
Funded under

Overlay control technology for sub-wavelength lithography for 65nm node and beyond in the integrated circuit industry

From 2003-11-01 to 2005-12-31 | OCSLI Website

Project details

Total cost:

EUR 2 940 560

EU contribution:

EUR 1 520 000

Coordinated in:

Israel

Funding scheme:

STREP - Specific Targeted Research Project

Objective

Coordinator

KLA-TENCOR CORPORATION (ISRAEL)
Israel
HATIKSHORET ST.
23100 MIGDAL HAEMEK
Israel
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Administrative contact: KASSEL,
Tel.: +972-4-6449637
Fax: +972-4-6449450
E-mail

Participants

AMD SAXONY LIMITED LIABILITY COMPANY & CO. KG
Germany
WILSCHDORFER LANDSTRASSE 101
01 109 DRESDEN
Germany
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INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM VZW
Belgium
Kapeldreef 75
LEUVEN
Belgium
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