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Charged particle nanotech

Charged particle nanotech

Objective

The IP proposal CHARGED PARTICLE NANOTECH (CHARPAN) focuses on the research and development of a new production technology for nanotechnology devices. In particular, CHARPAN will enable low cost engineering of complex 3D surface structures with nanometeri c precision. No such accurate fabrication technology exists to date. Industrial end-users are presently discouraged from expanding their nanotechnology-related business activities by either unacceptably high costs or the impossibility to control production processes on a nanometeric scale. CHARPAN will play a key role in realising the full potential of nanotechnology, as current nanofabrication tools are limited to archaic, slow processing rates, or do not achieve a competitive surface quality. The main in novation of this new technology are the flexible use of different ion species and the 200x reduction optics leading to direct structuring power at high throughput. A 18 member strong and diversified team from industry, academia and acclaimed European rese arch institutes are drawn together in a single integrated project to achieve these ambitious goals: - Development of projection-focused multi beam equipment for charged particle beam patterning, providing a massively parallel beam, structured by a pr ogrammable aperture plate. - Producing a prototype of the CHARPAN nanostructuring tool to establish a proof-of-concept (POC) of the CHARPAN concept and applications. - Research and development of charged particle beam process applications for new indu strial manufacturing processes and new materials. - At the end of the project a CHARPAN ion beam demonstration tool will be produced. It is the aim of CHARPAN to empower nanotechnology with a clear focus on industrial use, and to drive the rapid devel opment of nano-science leading to new processes and immediate industrial exploitation.

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Coordinator

IMS NANOFABRICATION AG

Address

Schreygasse, 3
Vienna

Austria

Administrative Contact

Elmar PLATZGUMMER (Dr)

Participants (23)

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BIONT, A.S.

Slovakia

CARDIFF UNIVERSITY

United Kingdom

CARL ZEISS NTS GMBH

Germany

CENTRUL INTERNATIONAL DE BIODINAMICA

Romania

COLORCHIP (ISRAEL) LTD

Israel

COMMISSARIAT À L'ENERGIE ATOMIQUE

France

CONSEJO SUPERIOR DE INVESTIGACIONES CIENTIFICAS - CENTRO NACIONAL DE MICROELECTRONICA

Spain

DELONG INSTRUMENTS SA

Czechia

FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.

Germany

GESELLSCHAFT FUER TECHNOLOGIEFOERDERUNG ITZEHOE MBH

Germany

INSTITUTE FOR MICROELECTRONICS STUTTGART

Germany

INSTITUTE OF MICROELECTRONICS TECHNOLOGY - RUSSIAN ACADEMY OF SCIENCES

Russia

LAMBDA CROSSING LTD.

Israel

MONASH UNIVERSITY

Australia

PHILIPS ELECTRONICS NEDERLAND B.V.

Netherlands

SLOVENSKA TECHNICKA UNIVERZITA V BRATISLAVE

Slovakia

STMICROELECTRONICS S.A.

France

SWINBURNE UNIVERSITY OF TECHNOLOGY

Australia

TECHNION - ISRAEL INSTITUTE OF TECHNOLOGY

Israel

TECHNISCHE UNIVERSITAET WIEN

Austria

TECHNISCHE UNIVERSITEIT EINDHOVEN

Netherlands

UNIVERSITY OF LIVERPOOL

United Kingdom

VEREINIGUNG HIGH TECH MARKETING

Austria

Project information

Grant agreement ID: 515803

  • Start date

    1 April 2005

  • End date

    31 March 2009

Funded under:

FP6-NMP

  • Overall budget:

    € 16 586 005

  • EU contribution

    € 9 500 000

Coordinated by:

IMS NANOFABRICATION AG

Austria