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Batch integration of high-quality materials to microsystems

Ziel

Integration of high-performance materials in microsystems (integrated electronics, systems, sensors and actuators) is limited by process incompatibility mainly (materials, temperature budget). Many technology combinations promising novel functionality in a large range of applications can therefore either not be realised today (e.g. high-performance sensors/actuators on CMOS), or are manufactured on a per-device level in a pick-and-place scheme with resulting high fabrication costs (e.g. microvalves), hindering such components from reaching the market and forcing industry to disregard the development of many novel devices.

The main objective of Q2M is therefore to develop methods that allow the cost efficient combination and integration through batch-microfabrication of components and materials that are unsuited for monolithic integration. This allows novel functionality and reduced manufacturing costs.

Two main strategies will be followed to push the technology beyond its current barriers. The first is the development of high quality actuator materials and their micromachining methods suited for wafer-scale fabrication. The second strategy is the development of transfer bonding methods for transferring materials and devices to semiconductor or polymer substrates. The development of both strategies will be guided by the specifications from three application areas: microvalving, micro-optics and RF-MEMS (radio frequency microelectronic components). Test structures will evaluate the developed techniques.

The Consortium has six research focussed partners, each expert/pioneer in at least one core aspect of the multidisciplinary scientific challenge, and five application focussed partners (2 SMEs, 3 larger consortia), chosen to anchor the work in real industrial needs while creating the basis for further development and exploitation. Moreover, a Q2M User Group of interested companies is formed for technology spreading and exploitation outside the consortium.

Wissenschaftliches Gebiet

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Finanzierungsplan

STREP - Specific Targeted Research Project

Koordinator

KUNGLIGA TEKNISKA HOGSKOLAN
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Adresse
VALHALLAVAGEN 79
100 44 STOCKHOLM
Schweden

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Beteiligte (11)

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Letzte Aktualisierung: 12 Juni 2012

Mein Booklet

Permalink: https://cordis.europa.eu/project/id/027926/de

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