Community Research and Development Information Service - CORDIS

Dry Develop Optical Lithography for ULSI

From 1988-12-01 to 1991-11-30

Project details

Total cost:

Not available

EU contribution:

Not available

Coordinated in:

Belgium

Objective

Coordinator

Interuniversitair Mikroelektronica Centrum
Belgium
Kapeldreef 75
3030 Heverlee
Belgium
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Administrative contact: Marianne VAN DEN BROECK
Tel.: +32-16-281491
Fax: +32-16-229400

Participants

Commissariat à l'Energie Atomique (CEA)
France
Centre d'Études de Grenoble 17 avenue des Martyrs
38041 Grenoble
France
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Administrative contact: Jean-Charles GUIBERT
Tel.: +33-76883581
Fax: +33-76885183
FARRAN TECHNOLOGY
Ireland
BALLINCOLLIG
CORK
Ireland
Administrative contact: KELLY
Tel.: +353-
Fax: +353-
GEC Plessey Semiconductors plc
United Kingdom
Caswell
NN12 8EQ Towcester
United Kingdom
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Administrative contact: MARTIN
Tel.: +44-327-50581
Fax: +44-327-53410
NEDERLANDSE PHILIPS BEDRIJVEN BV
Netherlands
PROF. HOLSTLAAN, 4
5656 AA EINDHOVEN
Netherlands
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Administrative contact: GOSSINK
Tel.: +31-40-742275
Fax: +31-40-743783
Siemens AG
Germany
Balanstraße 73
81541 München
Germany
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Administrative contact: Wolfgang ARDEN
Tel.: +49-89-63646313
Fax: +49-89 63648666
UCB ELECTRONICS SA
Belgium
AVENUE LOUISE, 326
1050 BRUXELLES
Belgium
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Administrative contact: Bruno ROLAND
Tel.: +32-2-3771170
Fax: +32-2-3783944
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