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MAsk less lithoGraphy for IC manufacturing (MAGIC)

Project description

Next-Generation Nanoelectronics Components and Electronics Integration MAGIC has supported the development of e-beam based maskless lithography technology in Europe: Two parallel lithography tool developments for 32nm CMOS and beyond and on lithography infrastructure.

In the CMOS manufacturing environment, the mask-based optical lithography technique is up to now driving solution to deal with all industry concerns. Nevertheless, this solution becomes less effective for each new technology node. Effectively, it requires more and more complex and expensive masks due to the introduction of optical proximity correction and phase shift techniques. The blow up of the tool prices play also an important role in the overall cost of ownership of this technique. This trend opens opportunity for the Mask-Less Lithography (ML2) technology, based on multi-beam principles and developped by the two European companies MAPPER and IMS Nanofabrication AG. The cost effective model of the ML2 option in association with the high resolution capability of the electron beam lithography and a reasonable throughput target represents an attractive alternative for lithography and is supported by some key CMOS manufacturers around the world, like TSMC, STMicroelectronics, QIMONDA, TOSHIBA, and Texas Instruments.

This project proposes to support the development of ML2 technology in Europe. It is composed of two linked poles. The first one will be focused on MAPPER and IMMS-NANO tools developments with the objective to deliver a first ML2 alpha platform compatible with 32 nm half pitch technology before 2010, aligned with the semiconductor manufacturer requirements. In relation with this activity, the program will develop the required infrastructure for the usage of this tools in an industrial environment. Among the tasks to be addressed, there is a delivery of a reliable software platform to treat the data base preparation and to provide solutions for ML2 related electron proximity effects. The last concern of this project will be to demonstrate the ability to integrate CMOS processes in real manufacturing conditions on the ML2 platform developpeed by the tool partners.

Field of science

  • /natural sciences/physical sciences/electromagnetism and electronics/electrical conductivity/semiconductor
  • /natural sciences/computer and information sciences/software

Call for proposal

FP7-ICT-2007-1
See other projects for this call

Funding Scheme

CP - Collaborative project (generic)

Coordinator

COMMISSARIAT A L ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
Address
Rue Leblanc 25
75015 Paris 15
France
Activity type
Research Organisations
EU contribution
€ 1 735 076
Administrative Contact
Marie-Laure Page (Ms)

Participants (18)

FACHHOCHSCHULE VORARLBERG GMBH
Austria
EU contribution
€ 126 544
Address
Hochschulstrasse
6850 Dornbirn
Activity type
Higher or Secondary Education Establishments
Administrative Contact
Johannes Edlinger (Dr.)
IMS NANOFABRICATION AG
Austria
EU contribution
€ 1 069 782
Address
Schreygasse 3
1020 Wien
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Hans Loeschner (Dr.)
DOW SILICONES BELGIUM
Belgium
EU contribution
€ 0
Address
Rue Jules Bordet Parc Industriel Zone C
7180 Seneffe
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Gerard MARQUET (Mr.)
FUJIFILM ELECTRONIC MATERIALS (EUROPE) N. V.
Belgium
EU contribution
€ 24 543
Address
Keetberglaan 1A, Havennummer 1061
2070 Zwijndrecht
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
EDDY CEELEN (Mr.)
DELONG INSTRUMENTS AS
Czechia
EU contribution
€ 851 775
Address
Palackeho Tr. 3019/153B
61200 Brno
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Michal Drsticka (RNDr.)
FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
Germany
EU contribution
€ 1 856 498
Address
Hansastrasse 27C
80686 Munchen
Activity type
Research Organisations
Administrative Contact
Walter KRAUSE (Mr)
GLOBALFOUNDRIES Dresden Module One LLC & Co. KG
Germany
EU contribution
€ 43 113
Address
Wilschdorfer Landstrasse 101
01109 Dresden
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Stephan Krueger (Mr.)
INSTITUT FUER MIKROELEKTRONIK STUTTGART
Germany
EU contribution
€ 1 000 176
Address
Allmandring Strasse 30A
70569 Stuttgart
Activity type
Research Organisations
Administrative Contact
Manfred Salzmann (-)
QIMONDA DRESDEN GMBH & CO.OHG

Participation ended

Germany
EU contribution
€ 199 543
Address
Koenigsbruecker Strasse 180
01099 Dresden
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Uwe Poepping (-)
ASELTA NANOGRAPHICS SA
France
EU contribution
€ 110 892
Address
Parvis Louis Neel 7
38000 Grenoble
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Olivier PENY (Mr.)
STMICROELECTRONICS CROLLES 2 SAS
France
EU contribution
€ 374 943
Address
Rue Jean Monnet 850
38920 Crolles
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Guilaine BOSC (Mrs)
SYNOPSYS INTERNATIONAL LIMITED
Ireland
EU contribution
€ 764 151
Address
Block 1 Blanchardstown Corporate Park
15 Dublin
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Watchorn Charles (Mr.)
KLA-TENCOR CORPORATION (ISRAEL)
Israel
EU contribution
€ 194 006
Address
Hatikshoret St.
23100 Migdal Haemek
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Adrien Davidson (Mr)
MAPPER LITHOGRAPHY B.V.
Netherlands
EU contribution
€ 3 398 957
Address
Computerlaan 15
2628 XK Delft
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Wim Hofland (Mr.)
Synopsys Armenia CJSC
Armenia
EU contribution
€ 0
Address
Arshakunyats
0026 Yerevan
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
SYNOPSYS SWITZERLAND LLC
Switzerland
EU contribution
€ 0
Address
Thurgauerstrasse 40
8050 Zurich
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
SYNOPSYS GMBH
Germany
EU contribution
€ 0
Address
Karl Hammerschmidt Str
85609 Aschheim
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
SYNOPSYS NETHERLANDS BV
Netherlands
EU contribution
€ 0
Address
St. Odgerusstraat 3
6045 Roermond
Activity type
Public bodies (excluding Research Organisations and Secondary or Higher Education Establishments)