CORDIS
EU research results

CORDIS

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Material Development for Double exposure and Double patterning

Project information

Grant agreement ID: 214948

Status

Closed project

  • Start date

    1 December 2007

  • End date

    30 November 2009

Funded under:

FP7-ICT

  • Overall budget:

    € 4 684 221

  • EU contribution

    € 3 092 423

Coordinated by:

COMMISSARIAT A L ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

France

Project description

Next-Generation Nanoelectronics Components and Electronics Integration

Coordinator

COMMISSARIAT A L ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

Address

Rue Leblanc 25
75015 Paris 15

France

Activity type

Research Organisations

EU Contribution

€ 1 060 958

Administrative Contact

Marie-Laure PAGE (Ms)

Participants (6)

FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.

Germany

EU Contribution

€ 407 158

FORSCHUNGSVERBUND BERLIN EV

Germany

EU Contribution

€ 167 940

CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE CNRS

France

EU Contribution

€ 149 123

STMICROELECTRONICS CROLLES 2 SAS

France

EU Contribution

€ 223 494

ROHM AND HAAS FRANCE SAS

France

EU Contribution

€ 710 000

"NATIONAL CENTER FOR SCIENTIFIC RESEARCH ""DEMOKRITOS"""

Greece

EU Contribution

€ 373 750

Project information

Grant agreement ID: 214948

Status

Closed project

  • Start date

    1 December 2007

  • End date

    30 November 2009

Funded under:

FP7-ICT

  • Overall budget:

    € 4 684 221

  • EU contribution

    € 3 092 423

Coordinated by:

COMMISSARIAT A L ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

France