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Gigascale Oriented Solid State flAsh Memory for EuRope

Gigascale Oriented Solid State flAsh Memory for EuRope

Objective

GOSSAMER successfully developed a fully integrated Flash NAND technology based on the TANOS concept, investigating a large number of architecture and material options.
The project aimed at the development of the technology for very high density Non Volatile Memories for mass storage applications down to the 2X nm technology node. The field is receiving increasing attention, due to the explosion of portable multimedia applications, and is forecasted to exceed 40 Billion US$ total available market by 2010. The dominant technology for this application is the floating gate NAND memory. However severe technological roadblocks (reduction in storage charge and electrostatic interference among neighboring cells) are limiting further scaling beyond the 32 nm node. Charge trapping in dielectric layers seems to be a viable alternative to floating gate. The main challenge is the integration of the different new materials, like tunnel dielectric, trapping layer, top dielectric, metal gate at the target technology node and the achievement of an acceptable trade-off between functionality and reliability (e.g. charge retention and endurance). The project covered material development, cell architecture, modeling of material properties, trapping and conduction behavior in the dielectrics, metal gate materials. Initial studies were performed on available technology 65-45nm (more relaxed for Universities and research centers) to arrive to full process integration and realization of full arrays in a technology in the 28-36 nm range (the best achievable with available lithography) by two major European semiconductor manufacturers. It included memory characterization and reliability testing, with the additional aim of defining standards and procedures for reliability assessment. Technology options for higher integration densities, for a given lithography node, were investigated with the help of public research partners. Following the faster than expected evolution of the floating gate NAND Flash technology, it was decided to anticipate a demonstration of the feasibility of the technology on a large scale device in 45nm technology, and to focus the final demonstration on the proof of the scalability of the TANOS technology towards the 20nm generation.

Coordinator

Numonyx Italy Srl

Address

Via Camillo Olivetti 2
20864 Agrate Brianza

Italy

Activity type

Private for-profit entities (excluding Higher or Secondary Education Establishments)

EU Contribution

€ 2 809 402

Administrative Contact

Manuela Seminara (Dr.)

Participants (20)

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ASM BELGIUM NV

Belgium

EU Contribution

€ 403 064

INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM

Belgium

EU Contribution

€ 2 411 695

FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.

Germany

EU Contribution

€ 1 782 224

QIMONDA DRESDEN GMBH & CO.OHG

Germany

EU Contribution

€ 1 973 957

NAMLAB GGMBH

Germany

TECHNISCHE UNIVERSITAET BRAUNSCHWEIG

Germany

EU Contribution

€ 352 440

TECHNISCHE UNIVERSITAET BERGAKADEMIE FREIBERG

Germany

EU Contribution

€ 368 560

ASM MICROCHEMISTRY OY

Finland

EU Contribution

€ 170 268

AYMING

France

EU Contribution

€ 266 190

UNIVERSITY COLLEGE CORK - NATIONAL UNIVERSITY OF IRELAND, CORK

Ireland

EU Contribution

€ 283 858

BRUKER JV ISRAEL LTD

Israel

EU Contribution

€ 404 308

CONSIGLIO NAZIONALE DELLE RICERCHE

Italy

EU Contribution

€ 440 002

ACTIVE TECHNOLOGIES SRL

Italy

EU Contribution

€ 337 506

CONSORZIO NAZIONALE INTERUNIVERSITARIO PER LA NANOELETTRONICA

Italy

EU Contribution

€ 962 002

ASM EUROPE BV

Netherlands

EU Contribution

€ 133 354

ASM INTERNATIONAL N.V.

Netherlands

UNIVERSITA DEGLI STUDI DI MODENA E REGGIO EMILIA

Italy

POLITECNICO DI MILANO

Italy

UNIVERSITA DEGLI STUDI DI UDINE

Italy

UNIVERSITA DEGLI STUDI DI FERRARA

Italy

Project information

Grant agreement ID: 214431

Status

Closed project

  • Start date

    1 January 2008

  • End date

    30 June 2011

Funded under:

FP7-ICT

  • Overall budget:

    € 20 811 603

  • EU contribution

    € 13 098 830

Coordinated by:

Numonyx Italy Srl

Italy